Effect of in situ hydrogen plasma on the ferroelectricity of hafnium zirconium oxide films

2020 ◽  
Vol 116 (3) ◽  
pp. 032901 ◽  
Author(s):  
Glen Walters ◽  
Aniruddh Shekhawat ◽  
Saeed Moghaddam ◽  
Jacob L. Jones ◽  
Toshikazu Nishida
2020 ◽  
Vol 12 (14) ◽  
pp. 16639-16647 ◽  
Author(s):  
Alexander C. Kozen ◽  
Zachary R. Robinson ◽  
Evan R. Glaser ◽  
Mark Twigg ◽  
Thomas J. Larrabee ◽  
...  

Author(s):  
R.A. Ploc

The optic axis of an electron microscope objective lens is usually assumed to be straight and co-linear with the mechanical center. No reason exists to assume such perfection and, indeed, simple reasoning suggests that it is a complicated curve. A current centered objective lens with a non-linear optic axis when used in conjunction with other lenses, leads to serious image errors if the nature of the specimen is such as to produce intense inelastic scattering.


2021 ◽  
Vol 286 ◽  
pp. 129234
Author(s):  
Yongli Guo ◽  
Hui Cai ◽  
Zhe Wang ◽  
Xin Wang ◽  
Peng Cao ◽  
...  

1960 ◽  
Vol 32 (1) ◽  
pp. 310-311 ◽  
Author(s):  
R. E. Salomon ◽  
W. M. Graven ◽  
G. B. Adams

1999 ◽  
Vol 567 ◽  
Author(s):  
Masayuki Suzuki ◽  
Yoji Saito

ABSTRACTWe tried direct oxynitridation of silicon surfaces by remote-plasma-exited nitrogen and oxygen gaseous mixtures at 700°C in a high vacuum. The oxynitrided surfaces were investigated with in-situ X-ray photoelectron spectroscopy. With increase of the oxynitridation time, the surface density of nitrogen gradually increases, but that of oxygen shows nearly saturation behavior after the rapid increase in the initial stage. We also annealed the grown oxynitride and oxide films to investigate the role of the contained nitrogen. The desorption rate of oxygen from the oxynitride films is much less than that from oxide films. We confirmed that nitrogen stabilizes the thermal stability of these oxynitride films.


2021 ◽  
Author(s):  
Om Kumar Prasad ◽  
Srikant Kumar Mohanty ◽  
ChienHung Wu ◽  
Tsung Ying Yu ◽  
K-M Chang

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