Effect of in situ hydrogen plasma on the ferroelectricity of hafnium zirconium oxide films
2020 ◽
Vol 12
(14)
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pp. 16639-16647
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Keyword(s):
1969 ◽
Vol 27
◽
pp. 140-141
Keyword(s):
1983 ◽
Vol 44
(C10)
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pp. C10-191-C10-194
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1960 ◽
Vol 32
(1)
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pp. 310-311
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1990 ◽
Vol 46
(1-4)
◽
pp. 435-440
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