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Metal‐oxide‐semiconductor field‐effect transistors and a ring oscillator fabricated in laser‐recrystallized polycrystalline silicon islands
Applied Physics Letters
◽
10.1063/1.93761
◽
1983
◽
Vol 42
(1)
◽
pp. 102-104
◽
Cited By ~ 12
Author(s):
T. Nishimura
◽
Y. Akasaka
◽
H. Nakata
◽
A. Ishizu
Keyword(s):
Metal Oxide
◽
Polycrystalline Silicon
◽
Field Effect
◽
Field Effect Transistors
◽
Metal Oxide Semiconductor
◽
Ring Oscillator
◽
Oxide Semiconductor
◽
Silicon Islands
Download Full-text
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Experimental Study of Physical-Vapor-Deposited Titanium Nitride Gate with An n+-Polycrystalline Silicon Capping Layer and Its Application to 20 nm Fin-Type Double-Gate Metal–Oxide–Semiconductor Field-Effect Transistors
Japanese Journal of Applied Physics
◽
10.7567/jjap.50.04dc14
◽
2011
◽
Vol 50
(4S)
◽
pp. 04DC14
◽
Cited By ~ 3
Author(s):
Takahiro Kamei
◽
Yongxun Liu
◽
Kazuhiko Endo
◽
Shinichi O'uchi
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Junichi Tsukada
◽
...
Keyword(s):
Experimental Study
◽
Metal Oxide
◽
Titanium Nitride
◽
Polycrystalline Silicon
◽
Field Effect
◽
Field Effect Transistors
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Metal Oxide Semiconductor
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Oxide Semiconductor
◽
Double Gate
◽
20 Nm
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Impact of Nitrogen Incorporation on Low-Frequency Noise of Polycrystalline Silicon/TiN/HfO2/SiO2Gate-Stack Metal–Oxide–Semiconductor Field-Effect Transistors
Japanese Journal of Applied Physics
◽
10.7567/jjap.50.10pb02
◽
2011
◽
Vol 50
(10S)
◽
pp. 10PB02
◽
Cited By ~ 1
Author(s):
Takeo Matsuki
◽
Ranga Hettiarachchi
◽
Wei Feng
◽
Kenji Shiraishi
◽
Keisaku Yamada
◽
...
Keyword(s):
Metal Oxide
◽
Polycrystalline Silicon
◽
Field Effect
◽
Field Effect Transistors
◽
Low Frequency
◽
Metal Oxide Semiconductor
◽
Oxide Semiconductor
◽
Frequency Noise
◽
Low Frequency Noise
◽
Nitrogen Incorporation
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A model of electrical conduction across the grain boundaries in polycrystalline-silicon thin film transistors and metal oxide semiconductor field effect transistors
Journal of Applied Physics
◽
10.1063/1.3173179
◽
2009
◽
Vol 106
(2)
◽
pp. 024504
◽
Cited By ~ 5
Author(s):
Kiran Sharma
◽
D. P. Joshi
Keyword(s):
Thin Film
◽
Metal Oxide
◽
Electrical Conduction
◽
Thin Film Transistors
◽
Polycrystalline Silicon
◽
Field Effect
◽
Field Effect Transistors
◽
Metal Oxide Semiconductor
◽
Oxide Semiconductor
◽
Silicon Thin Film
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Effect of polycrystalline-silicon gate types on the opposite flatband voltage shift in n-type and p-type metal–oxide–semiconductor field-effect transistors for high-k-HfO2 dielectric
Applied Physics Letters
◽
10.1063/1.1592634
◽
2003
◽
Vol 83
(2)
◽
pp. 308-310
◽
Cited By ~ 27
Author(s):
C. W. Yang
◽
Y. K. Fang
◽
C. H. Chen
◽
S. F. Chen
◽
C. Y. Lin
◽
...
Keyword(s):
Metal Oxide
◽
Polycrystalline Silicon
◽
Field Effect
◽
Field Effect Transistors
◽
Metal Oxide Semiconductor
◽
Oxide Semiconductor
◽
Voltage Shift
◽
High K
◽
Flatband Voltage
◽
P Type
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Investigation and Integration of Polycrystalline Silicon/TiN/SiON Gate Stack in Silicon on Thin Buried Oxide Complementary Metal Oxide Semiconductor Field Effect Transistors
Japanese Journal of Applied Physics
◽
10.1143/jjap.51.076504
◽
2012
◽
Vol 51
◽
pp. 076504
Author(s):
Takashi Ishigaki
◽
Ryuta Tsuchiya
◽
Yusuke Morita
◽
Nobuyuki Sugii
◽
Shinichiro Kimura
◽
...
Keyword(s):
Metal Oxide
◽
Polycrystalline Silicon
◽
Field Effect
◽
Field Effect Transistors
◽
Complementary Metal Oxide Semiconductor
◽
Metal Oxide Semiconductor
◽
Oxide Semiconductor
◽
Gate Stack
◽
Buried Oxide
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Impact of Nitrogen Incorporation on Low-Frequency Noise of Polycrystalline Silicon/TiN/HfO$_{2}$/SiO$_{2}$ Gate-Stack Metal–Oxide–Semiconductor Field-Effect Transistors
Japanese Journal of Applied Physics
◽
10.1143/jjap.50.10pb02
◽
2011
◽
Vol 50
(10)
◽
pp. 10PB02
◽
Cited By ~ 1
Author(s):
Takeo Matsuki
◽
Ranga Hettiarachchi
◽
Wei Feng
◽
Kenji Shiraishi
◽
Keisaku Yamada
◽
...
Keyword(s):
Metal Oxide
◽
Polycrystalline Silicon
◽
Field Effect
◽
Field Effect Transistors
◽
Low Frequency
◽
Metal Oxide Semiconductor
◽
Oxide Semiconductor
◽
Frequency Noise
◽
Low Frequency Noise
◽
Nitrogen Incorporation
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Experimental Study of Physical-Vapor-Deposited Titanium Nitride Gate with An n+-Polycrystalline Silicon Capping Layer and Its Application to 20 nm Fin-Type Double-Gate Metal–Oxide–Semiconductor Field-Effect Transistors
Japanese Journal of Applied Physics
◽
10.1143/jjap.50.04dc14
◽
2011
◽
Vol 50
(4)
◽
pp. 04DC14
◽
Cited By ~ 10
Author(s):
Takahiro Kamei
◽
Yongxun Liu
◽
Kazuhiko Endo
◽
Shinichi O'uchi
◽
Junichi Tsukada
◽
...
Keyword(s):
Experimental Study
◽
Metal Oxide
◽
Titanium Nitride
◽
Polycrystalline Silicon
◽
Field Effect
◽
Field Effect Transistors
◽
Metal Oxide Semiconductor
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Oxide Semiconductor
◽
Double Gate
◽
20 Nm
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Polycrystalline silicon/metal stacked gate for threshold voltage control in metal–oxide–semiconductor field-effect transistors
Applied Physics Letters
◽
10.1063/1.126218
◽
2000
◽
Vol 76
(14)
◽
pp. 1938-1940
◽
Cited By ~ 2
Author(s):
Igor Polishchuk
◽
Chenming Hu
Keyword(s):
Metal Oxide
◽
Threshold Voltage
◽
Polycrystalline Silicon
◽
Field Effect
◽
Field Effect Transistors
◽
Voltage Control
◽
Metal Oxide Semiconductor
◽
Oxide Semiconductor
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Channel electron conduction in laser‐annealed polycrystalline silicon metal‐oxide semiconductor field‐effect transistors
Applied Physics Letters
◽
10.1063/1.92157
◽
1981
◽
Vol 38
(10)
◽
pp. 770-772
◽
Cited By ~ 9
Author(s):
Han‐Sheng Lee
Keyword(s):
Metal Oxide
◽
Polycrystalline Silicon
◽
Field Effect
◽
Field Effect Transistors
◽
Metal Oxide Semiconductor
◽
Oxide Semiconductor
◽
Electron Conduction
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Characterization and passivation of band gap states in metal-oxide-semiconductor field effect transistors with polycrystalline silicon channel
18th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)
◽
10.1109/ipfa.2011.5992724
◽
2011
◽
Author(s):
Tae-Young Jang
◽
Dong-Hyoub Kim
◽
Jungwoo Kim
◽
Jun Suk Chang
◽
Hoichang Yang
◽
...
Keyword(s):
Metal Oxide
◽
Band Gap
◽
Polycrystalline Silicon
◽
Field Effect
◽
Field Effect Transistors
◽
Metal Oxide Semiconductor
◽
Oxide Semiconductor
◽
Gap States
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