Investigation and Integration of Polycrystalline Silicon/TiN/SiON Gate Stack in Silicon on Thin Buried Oxide Complementary Metal Oxide Semiconductor Field Effect Transistors
Keyword(s):
2009 ◽
Vol 48
(4)
◽
pp. 04C051
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2015 ◽
Vol 36
(7)
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pp. 672-674
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Keyword(s):
2001 ◽
pp. 1343-1350
2011 ◽
Vol 50
(4S)
◽
pp. 04DC14
◽
2007 ◽
Vol 46
(4B)
◽
pp. 1921-1928
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