scholarly journals A film-texture driven piezoelectricity of AlN thin films grown at low temperatures by plasma-enhanced atomic layer deposition

APL Materials ◽  
2020 ◽  
Vol 8 (7) ◽  
pp. 071101
Author(s):  
Tai Nguyen ◽  
Noureddine Adjeroud ◽  
Sebastjan Glinsek ◽  
Yves Fleming ◽  
Jérôme Guillot ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Low Temperatures ◽  
Atomic Layer ◽  
Layer Deposition

scholarly journals Structural defects in ZnO thin films grown by atomic layer deposition at low temperatures

2021 ◽  
Vol 27 (S1) ◽  
pp. 2660-2662
Author(s):  
David Elam ◽  
Eduardo Ortega ◽  
Andrey Chabanov ◽  
Arturo Ponce
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Low Temperatures ◽  
Atomic Layer ◽  
Structural Defects ◽  
Zno Thin Films ◽  
Layer Deposition

Iridium metal and iridium oxide thin films grown by atomic layer deposition at low temperatures

2011 ◽  
Vol 21 (41) ◽  
pp. 16488 ◽  
Author(s):  
Jani Hämäläinen ◽  
Timo Hatanpää ◽  
Esa Puukilainen ◽  
Timo Sajavaara ◽  
Mikko Ritala ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Low Temperatures ◽  
Atomic Layer ◽  
Iridium Oxide ◽  
Oxide Thin Films ◽  
Layer Deposition

Antibacterial and barrier properties of oriented polymer films with ZnO thin films applied with atomic layer deposition at low temperatures

2014 ◽  
Vol 562 ◽  
pp. 331-337 ◽  
Author(s):  
Mika Vähä-Nissi ◽  
Marja Pitkänen ◽  
Erkki Salo ◽  
Eija Kenttä ◽  
Anne Tanskanen ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Polymer Films ◽  
Low Temperatures ◽  
Atomic Layer ◽  
Barrier Properties ◽  
Zno Thin Films ◽  
Oriented Polymer ◽  
Layer Deposition

Synthesis of SnS Thin Films by Atomic Layer Deposition at Low Temperatures

2017 ◽  
Vol 29 (19) ◽  
pp. 8100-8110 ◽  
Author(s):  
In-Hwan Baek ◽  
Jung Joon Pyeon ◽  
Young Geun Song ◽  
Taek-Mo Chung ◽  
Hae-Ryoung Kim ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Low Temperatures ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Sns Thin Films

scholarly journals Atomic Layer Deposition of PbS Thin Films at Low Temperatures

2020 ◽  
Vol 32 (19) ◽  
pp. 8216-8228
Author(s):  
Georgi Popov ◽  
Goran Bačić ◽  
Miika Mattinen ◽  
Toni Manner ◽  
Hannu Lindström ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Low Temperatures ◽  
Atomic Layer ◽  
Layer Deposition

scholarly journals Hollow cathode plasma-assisted atomic layer deposition of crystalline AlN, GaN and AlxGa1−xN thin films at low temperatures

2014 ◽  
Vol 2 (12) ◽  
pp. 2123-2136 ◽  
Author(s):  
Cagla Ozgit-Akgun ◽  
Eda Goldenberg ◽  
Ali Kemal Okyay ◽  
Necmi Biyikli
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Hollow Cathode ◽  
Low Temperatures ◽  
Atomic Layer ◽  
Low Temperature Plasma ◽  
Cathode Plasma ◽  
Temperature Plasma ◽  
Layer Deposition

The authors report on the use of hollow cathode plasma for low-temperature plasma-assisted atomic layer deposition (PA-ALD) of crystalline AlN, GaN and AlxGa1−xN thin films with low impurity concentrations.

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