Platinum thin films with good thermal and chemical stability fabricated by inductively coupled plasma-enhanced atomic layer deposition at low temperatures
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2011 ◽
Vol 21
(41)
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pp. 16488
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2011 ◽
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pp. 015008
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2016 ◽
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2015 ◽
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2017 ◽
Vol 29
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pp. 8100-8110
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