Structural and Electrical Properties of ZnO Thin Films Deposited by Atomic Layer Deposition at Low Temperatures

2008 ◽  
Vol 155 (10) ◽  
pp. H738 ◽  
Author(s):  
Sunyeol Jeon ◽  
Seokhwan Bang ◽  
Seungjun Lee ◽  
Semyung Kwon ◽  
Wooho Jeong ◽  
...  
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Atomic Layer Deposition ◽  
Low Temperatures ◽  
Atomic Layer ◽  
Zno Thin Films ◽  
Layer Deposition ◽  
Structural And Electrical Properties

scholarly journals Structural defects in ZnO thin films grown by atomic layer deposition at low temperatures

2021 ◽  
Vol 27 (S1) ◽  
pp. 2660-2662
Author(s):  
David Elam ◽  
Eduardo Ortega ◽  
Andrey Chabanov ◽  
Arturo Ponce
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Low Temperatures ◽  
Atomic Layer ◽  
Structural Defects ◽  
Zno Thin Films ◽  
Layer Deposition

Structural and electrical properties of ternary Ru–AlN thin films prepared by plasma-enhanced atomic layer deposition

2012 ◽  
Vol 47 (3) ◽  
pp. 790-793 ◽  
Author(s):  
Yu-Ri Shin ◽  
Won-Sub Kwack ◽  
Yun Chang Park ◽  
Jin-Hyock Kim ◽  
Seung-Yong Shin ◽  
...  
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Structural And Electrical Properties

Antibacterial and barrier properties of oriented polymer films with ZnO thin films applied with atomic layer deposition at low temperatures

2014 ◽  
Vol 562 ◽  
pp. 331-337 ◽  
Author(s):  
Mika Vähä-Nissi ◽  
Marja Pitkänen ◽  
Erkki Salo ◽  
Eija Kenttä ◽  
Anne Tanskanen ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Polymer Films ◽  
Low Temperatures ◽  
Atomic Layer ◽  
Barrier Properties ◽  
Zno Thin Films ◽  
Oriented Polymer ◽  
Layer Deposition

Structural and electrical properties of Ge-doped ZrO2 thin films grown by atomic layer deposition for high-k dielectrics

2018 ◽  
Vol 53 (21) ◽  
pp. 15237-15245 ◽  
Author(s):  
Bo-Eun Park ◽  
Yujin Lee ◽  
Il-Kwon Oh ◽  
Wontae Noh ◽  
Satoko Gatineau ◽  
...  
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Layer Deposition ◽  
High K ◽  
Structural And Electrical Properties

Structural and electrical properties of AlN thin films on GaN substrates grown by plasma enhanced-Atomic Layer Deposition

2019 ◽  
Vol 97 ◽  
pp. 35-39 ◽  
Author(s):  
Emanuela Schilirò ◽  
Filippo Giannazzo ◽  
Corrado Bongiorno ◽  
Salvatore Di Franco ◽  
Giuseppe Greco ◽  
...  
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Structural And Electrical Properties

Synthesis of ZrO2 thin films by atomic layer deposition: growth kinetics, structural and electrical properties

2002 ◽  
Vol 193 (1-4) ◽  
pp. 120-128 ◽  
Author(s):  
Michel Cassir ◽  
Fabrice Goubin ◽  
Cécile Bernay ◽  
Philippe Vernoux ◽  
Daniel Lincot
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Atomic Layer Deposition ◽  
Growth Kinetics ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Structural And Electrical Properties
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