Successive ionic layer deposition. The use in nanotechnology
2006 ◽
Vol 75
(2)
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pp. 161-175
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1997 ◽
Vol 112
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pp. 255-257
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Keyword(s):
2005 ◽
Vol 23
(4)
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pp. 836-840
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Keyword(s):
2011 ◽
Vol 46
(13)
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pp. 4555-4561
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Keyword(s):
2011 ◽
Vol 128
(3)
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pp. 433-441
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1993 ◽
Vol 62
(3)
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pp. 237-242
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2019 ◽
Vol 473
◽
pp. 313-317
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