Investigation on anti-reflection property of nitrogen doped diamond-like carbon (DLC) films produced by RF magnetron sputtering

2002 ◽  
Vol 386 (1) ◽  
pp. 61-66
Author(s):  
P. R. Vinod ◽  
H. Kakiuchi ◽  
T. Terai ◽  
A. N. Itakura ◽  
M. Kitajima
Keyword(s):  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Diamond Like Carbon ◽  
Nitrogen Doped ◽  
Reflection Property

Etching Characteristics and Surface Morphology of Nitrogen-Doped a-SiC Films Prepared by RF Magnetron Sputtering

2019 ◽  
Vol 14 (1) ◽  
pp. 375-384 ◽  
Author(s):  
Mariana A. Fraga ◽  
Rodrigo S. Pessoa ◽  
Ivo C. Oliveira ◽  
Marcos Massi ◽  
Homero S. Maciel ◽  
...  
Keyword(s):  
Surface Morphology ◽  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Nitrogen Doped ◽  
Sic Films

Nitrogen Doped ZnO (ZnO:N) Thin Films Deposited by Reactive RF Magnetron Sputtering for PEC Application

2012 ◽  
pp. 669-676
Author(s):  
Sudhakar Shet ◽  
Kwang-Soon Ahn ◽  
Nuggehalli Ravindra ◽  
Yanfa Yan ◽  
Mowafak Al-Jassim
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Nitrogen Doped ◽  
Doped Zno ◽  
Reactive Rf Magnetron Sputtering

scholarly journals Structure and Thermal Stability of the Chemical Bondings of Diamond-Like Carbon (DLC) Films Prepared by RF Magnetron Sputtering

Hyomen Kagaku ◽  
2003 ◽  
Vol 24 (7) ◽  
pp. 411-416 ◽  
Author(s):  
Takamasa MIKAMI ◽  
Hideki NAKAZAWA ◽  
Yoshiharu ENTA ◽  
Maki SUEMITSU ◽  
Masao MASHITA
Keyword(s):  
Thermal Stability ◽  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Diamond Like Carbon ◽  
Thermal Stability Of
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