Langmuir probe evaluation of ion bombardment during Ti-N growth by unbalanced magnetron sputtering

1996 ◽  
Vol 281-282 ◽  
pp. 52-56 ◽  
Author(s):  
C. Wiemer ◽  
F. Lévy ◽  
R. Messier
Keyword(s):  
Magnetron Sputtering ◽  
Langmuir Probe ◽  
Ion Bombardment ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron

scholarly journals Single Langmuir Probe Measurements in an Unbalanced Magnetron Sputtering System

2012 ◽  
Vol 32 ◽  
pp. 962-968 ◽  
Author(s):  
K. Honglertkongsakul ◽  
S. Chaiyakun ◽  
N. Witit-anun ◽  
W. Kongsri ◽  
P. Limsuwan
Keyword(s):  
Magnetron Sputtering ◽  
Langmuir Probe ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron ◽  
Langmuir Probe Measurements ◽  
Probe Measurements ◽  
Sputtering System

Electrical properties of ZnO-based photodetector prepared by room temperature DC unbalanced magnetron sputtering

2016 ◽  
Author(s):  
Eka Nurfani ◽  
Angga Virdian ◽  
Robi Kurniawan ◽  
Shibghatullah Muhammady ◽  
Inge M. Sutjahja ◽  
...  
Keyword(s):  
Electrical Properties ◽  
Magnetron Sputtering ◽  
Room Temperature ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron

Synthesis of (Ti, Zr)N hard coatings by unbalanced magnetron sputtering

2000 ◽  
Vol 130 (1) ◽  
pp. 64-68 ◽  
Author(s):  
Da-Yung Wang ◽  
Chi-Lung Chang ◽  
Cheng-Hsun Hsu ◽  
Hua-Ni Lin
Keyword(s):  
Magnetron Sputtering ◽  
Hard Coatings ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron
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