Production and transport chemistry of atomic fluorine in remote plasma source and cylindrical reaction chamber
2007 ◽
Vol 40
(17)
◽
pp. 5140-5154
◽
2020 ◽
Vol 38
(2)
◽
pp. 023007
◽
2019 ◽
Vol 37
(4)
◽
pp. 040601
◽
2010 ◽
Vol 28
(4)
◽
pp. 856-860
◽
2021 ◽
Vol 39
(6)
◽
pp. 062403
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