scholarly journals Innovative remote plasma source for atomic layer deposition for GaN devices

2021 ◽  
Vol 39 (6) ◽  
pp. 062403
Author(s):  
Harm C. M. Knoops ◽  
Karsten Arts ◽  
Jan W. Buiter ◽  
Luca Matteo Martini ◽  
Richard Engeln ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Plasma Source ◽  
Remote Plasma ◽  
Layer Deposition

Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study

2012 ◽  
Vol 30 (1) ◽  
pp. 01A115 ◽  
Author(s):  
Maarit Kariniemi ◽  
Jaakko Niinistö ◽  
Marko Vehkamäki ◽  
Marianna Kemell ◽  
Mikko Ritala ◽  
...  
Keyword(s):  
Experimental Study ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Remote Plasma ◽  
Layer Deposition ◽  
Deposition Processes

scholarly journals Remote plasma enhanced atomic layer deposition of ZnO for thin film electronic applications

2012 ◽  
Vol 97 ◽  
pp. 162-165 ◽  
Author(s):  
S.M. Sultan ◽  
O.D. Clark ◽  
T.B. Masaud ◽  
Q. Fang ◽  
R. Gunn ◽  
...  
Keyword(s):  
Thin Film ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Remote Plasma ◽  
Layer Deposition

Remote plasma-enhanced atomic layer deposition of gallium oxide thin films with NH3 plasma pretreatment

2019 ◽  
Vol 40 (1) ◽  
pp. 012806 ◽  
Author(s):  
Hui Hao ◽  
Xiao Chen ◽  
Zhengcheng Li ◽  
Yang Shen ◽  
Hu Wang ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Gallium Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Remote Plasma ◽  
Layer Deposition ◽  
Plasma Pretreatment
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