High-performance polycrystalline silicon thin-film transistors integrating sputtered aluminum-oxide gate dielectric with bridged-grain active channel

2013 ◽  
Vol 28 (11) ◽  
pp. 115003 ◽  
Author(s):  
Meng Zhang ◽  
Wei Zhou ◽  
Rongsheng Chen ◽  
Man Wong ◽  
Hoi-Sing Kwok
Keyword(s):  
Thin Film ◽  
Aluminum Oxide ◽  
Thin Film Transistors ◽  
Polycrystalline Silicon ◽  
High Performance ◽  
Gate Dielectric ◽  
Silicon Thin Film ◽  
Active Channel

High-performance polycrystalline silicon thin-film transistors with oxide–nitride–oxide gate dielectric and multiple nanowire channels

2006 ◽  
Vol 515 (3) ◽  
pp. 1112-1116
Author(s):  
Shih-Ching Chen ◽  
Ting-Chang Chang ◽  
Po-Tsun Liu ◽  
Y.C. Wu ◽  
C.C. Tsai ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
Polycrystalline Silicon ◽  
High Performance ◽  
Gate Dielectric ◽  
Silicon Thin Film ◽  
Nitride Oxide
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