Electrical and structural characterization of nitrogen doped ZnO layers grown at low temperature by atomic layer deposition

2014 ◽  
Vol 29 (8) ◽  
pp. 085006 ◽  
Author(s):  
Vl Kolkovsky ◽  
D Snigurenko ◽  
R Jakiela ◽  
E Guziewicz
Keyword(s):  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Structural Characterization ◽  
Atomic Layer ◽  
Nitrogen Doped ◽  
Layer Deposition ◽  
Doped Zno

Nitrogen-Doped ZnO Film Fabricated Via Rapid Low-Temperature Atomic Layer Deposition for High-Performance ZnON Transistors

2018 ◽  
Vol 65 (8) ◽  
pp. 3283-3290 ◽  
Author(s):  
Xingwei Ding ◽  
Jun Yang ◽  
Cunping Qin ◽  
Xuyong Yang ◽  
Tao Ding ◽  
...  
Keyword(s):  
Low Temperature ◽  
Atomic Layer Deposition ◽  
High Performance ◽  
Atomic Layer ◽  
Zno Film ◽  
Nitrogen Doped ◽  
Layer Deposition ◽  
Doped Zno

Nitrogen-doped ZnO/n-Si core–shell nanowire photodiode prepared by atomic layer deposition

2015 ◽  
Vol 33 ◽  
pp. 154-160 ◽  
Author(s):  
Kyung Yong Ko ◽  
Hyemin Kang ◽  
Wonseon Lee ◽  
Chang-Wan Lee ◽  
Jusang Park ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Core Shell ◽  
Nitrogen Doped ◽  
Layer Deposition ◽  
Doped Zno

Columnar nitrogen-doped ZnO nanostructured thin films obtained through atomic layer deposition

2021 ◽  
Author(s):  
Jorge Rodríguez-López ◽  
RICARDO RANGEL ◽  
Antonio Ramos ◽  
Dainet Berman ◽  
Patricia Quintana-Owen ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Nitrogen Doped ◽  
Nanostructured Thin Films ◽  
Layer Deposition ◽  
Doped Zno

Characterization of dielectric layers grown at low temperature by atomic layer deposition

2015 ◽  
Vol 577 ◽  
pp. 97-102 ◽  
Author(s):  
Sylwia Gieraltowska ◽  
Lukasz Wachnicki ◽  
Bartlomiej S. Witkowski ◽  
Robert Mroczynski ◽  
Piotr Dluzewski ◽  
...  
Keyword(s):  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Dielectric Layers ◽  
Layer Deposition

Low-temperature remote plasma-enhanced atomic layer deposition of graphene and characterization of its atomic-level structure

2014 ◽  
Vol 2 (36) ◽  
pp. 7570-7574 ◽  
Author(s):  
Yijun Zhang ◽  
Wei Ren ◽  
Zhuangde Jiang ◽  
Shuming Yang ◽  
Weixuan Jing ◽  
...  
Keyword(s):  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Low Temperatures ◽  
Level Structure ◽  
Atomic Layer ◽  
Atomic Level ◽  
Atomic Resolution ◽  
Remote Plasma ◽  
Layer Deposition

Atomic-resolution image of a graphene sheet synthesized by remote plasma-enhanced atomic layer deposition at low temperatures.

scholarly journals Luminescent properties of europium titanium phosphate thin films deposited by atomic layer deposition

RSC Advances ◽  
2017 ◽  
Vol 7 (13) ◽  
pp. 8051-8059 ◽  
Author(s):  
Michael N. Getz ◽  
Per-Anders Hansen ◽  
Helmer Fjellvåg ◽  
Ola Nilsen
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Structural Characterization ◽  
Atomic Layer ◽  
Luminescent Properties ◽  
Titanium Phosphate ◽  
The Novel ◽  
Layer Deposition ◽  
Novel Material

Optical and structural characterization of luminescent thin films of the novel material europium titanium phosphate, deposited by atomic layer deposition.

Atomic layer deposition and characterization of Ga-doped ZnO thin films

2007 ◽  
Vol 42 (1-6) ◽  
pp. 172-175 ◽  
Author(s):  
K. Saito ◽  
Y. Hiratsuka ◽  
A. Omata ◽  
H. Makino ◽  
S. Kishimoto ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Zno Thin Films ◽  
Layer Deposition ◽  
Doped Zno
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