Nitrogen-Doped ZnO Film Fabricated Via Rapid Low-Temperature Atomic Layer Deposition for High-Performance ZnON Transistors

IEEE Transactions on Electron Devices ◽

10.1109/ted.2018.2848275 ◽

2018 ◽

Vol 65 (8) ◽

pp. 3283-3290 ◽

Author(s):

Xingwei Ding ◽

Jun Yang ◽

Cunping Qin ◽

Xuyong Yang ◽

Tao Ding ◽

...

Keyword(s):

Low Temperature ◽

Atomic Layer Deposition ◽

High Performance ◽

Atomic Layer ◽

Zno Film ◽

Nitrogen Doped ◽

Layer Deposition ◽

Download Full-text

High performance thin film transistor with low temperature atomic layer deposition nitrogen-doped ZnO

Applied Physics Letters ◽

10.1063/1.2803219 ◽

2007 ◽

Vol 91 (18) ◽

pp. 183517 ◽

Author(s):

S. J. Lim ◽

Soon-ju Kwon ◽

Hyungjun Kim ◽

Jin-Seong Park

Keyword(s):

Thin Film ◽

Low Temperature ◽

Atomic Layer Deposition ◽

High Performance ◽

Thin Film Transistor ◽

Atomic Layer ◽

Nitrogen Doped ◽

Layer Deposition ◽

Download Full-text

High-performance flexible Ag nanowire electrode with low-temperature atomic-layer-deposition fabrication of conductive-bridging ZnO film

nano Online ◽

10.1515/nano.11671_2015.161 ◽

2016 ◽

Author(s):

Ya-Hui Duan ◽

Yu Duan ◽

Ping Chen ◽

Ye Tao ◽

Yong-Qiang Yang ◽

...

Keyword(s):

Low Temperature ◽

Atomic Layer Deposition ◽

High Performance ◽

Atomic Layer ◽

Zno Film ◽

Layer Deposition ◽

Download Full-text

High-performance flexible Ag nanowire electrode with low-temperature atomic-layer-deposition fabrication of conductive-bridging ZnO film

Nanoscale Research Letters ◽

10.1186/s11671-015-0810-x ◽

2015 ◽

Vol 10 (1) ◽

Author(s):

Ya-Hui Duan ◽

Yu Duan ◽

Ping Chen ◽

Ye Tao ◽

Yong-Qiang Yang ◽

...

Keyword(s):

Low Temperature ◽

Atomic Layer Deposition ◽

High Performance ◽

Atomic Layer ◽

Zno Film ◽

Layer Deposition ◽

Download Full-text

Electrical and structural characterization of nitrogen doped ZnO layers grown at low temperature by atomic layer deposition

Semiconductor Science and Technology ◽

10.1088/0268-1242/29/8/085006 ◽

2014 ◽

Vol 29 (8) ◽

pp. 085006 ◽

Author(s):

Vl Kolkovsky ◽

D Snigurenko ◽

R Jakiela ◽

E Guziewicz

Keyword(s):

Low Temperature ◽

Atomic Layer Deposition ◽

Structural Characterization ◽

Atomic Layer ◽

Nitrogen Doped ◽

Layer Deposition ◽

Download Full-text

Low-temperature high-performance In-Ga-Sn-O thin-film transistors with Al2O3 grown by a facile dual-atomic layer deposition

Journal of Alloys and Compounds ◽

10.1016/j.jallcom.2021.160053 ◽

2021 ◽

pp. 160053

Author(s):

Hyunjae Jang ◽

Changyong Oh ◽

Tae Hyun Kim ◽

Hyeong Wook Kim ◽

Sang Ik Lee ◽

...

Keyword(s):

Thin Film ◽

Low Temperature ◽

Atomic Layer Deposition ◽

Thin Film Transistors ◽

High Performance ◽

Atomic Layer ◽

Layer Deposition

Download Full-text

Nitrogen-doped ZnO/n-Si core–shell nanowire photodiode prepared by atomic layer deposition

Materials Science in Semiconductor Processing ◽

10.1016/j.mssp.2015.02.004 ◽

2015 ◽

Vol 33 ◽

pp. 154-160 ◽

Author(s):

Kyung Yong Ko ◽

Hyemin Kang ◽

Wonseon Lee ◽

Chang-Wan Lee ◽

Jusang Park ◽

...

Keyword(s):

Atomic Layer Deposition ◽

Atomic Layer ◽

Nitrogen Doped ◽

Layer Deposition ◽

Download Full-text

Energy Storage: High-Performance High-Loading Lithium-Sulfur Batteries by Low Temperature Atomic Layer Deposition of Aluminum Oxide on Nanophase S Cathodes (Adv. Mater. Interfaces 17/2017)

Advanced Materials Interfaces ◽

10.1002/admi.201770086 ◽

2017 ◽

Vol 4 (17) ◽

Author(s):

Xiangbo Meng ◽

Yuzi Liu ◽

Yanqiang Cao ◽

Yang Ren ◽

Wenquan Lu ◽

...

Keyword(s):

Energy Storage ◽

Low Temperature ◽

Atomic Layer Deposition ◽

Aluminum Oxide ◽

High Performance ◽

Atomic Layer ◽

High Loading ◽

Layer Deposition ◽

Lithium Sulfur Batteries ◽

Download Full-text

Columnar nitrogen-doped ZnO nanostructured thin films obtained through atomic layer deposition

Nanotechnology ◽

10.1088/1361-6528/ac0fa1 ◽

2021 ◽

Author(s):

Jorge Rodríguez-López ◽

RICARDO RANGEL ◽

Antonio Ramos ◽

Dainet Berman ◽

Patricia Quintana-Owen ◽

...

Keyword(s):

Atomic Layer Deposition ◽

Atomic Layer ◽

Nitrogen Doped ◽

Nanostructured Thin Films ◽

Layer Deposition ◽

Download Full-text

Characterization of ZnO film grown on polycarbonate by atomic layer deposition at low temperature

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.4903270 ◽

2015 ◽

Vol 33 (1) ◽

pp. 01A134 ◽

Author(s):

Gyeong Beom Lee ◽

Gwon Deok Han ◽

Joon Hyung Shim ◽

Byoung-Ho Choi

Keyword(s):

Low Temperature ◽

Atomic Layer Deposition ◽

Atomic Layer ◽

Zno Film ◽

Layer Deposition

Download Full-text

Low temperature method to passivate oxygen vacancies in un-doped ZnO films using atomic layer deposition

Thin Solid Films ◽

10.1016/j.tsf.2018.03.003 ◽

2018 ◽

Vol 660 ◽

pp. 852-858 ◽

Author(s):

Yue Wang ◽

Kyung-Mun Kang ◽

Minjae Kim ◽

Hyung-Ho Park

Keyword(s):

Low Temperature ◽

Atomic Layer Deposition ◽

Oxygen Vacancies ◽

Atomic Layer ◽

Zno Films ◽

Temperature Method ◽

Layer Deposition ◽

Download Full-text