Improving source efficiency for aluminum nitride grown by metal organic chemical vapor deposition

2016 ◽  
Vol 31 (8) ◽  
pp. 085003 ◽  
Author(s):  
Humberto M Foronda ◽  
Matthew A Laurent ◽  
Benjanim Yonkee ◽  
Stacia Keller ◽  
Steven P DenBaars ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Aluminum Nitride ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition

Investigation of aluminum nitride grown by metal–organic chemical-vapor deposition on silicon carbide

1997 ◽  
Vol 82 (6) ◽  
pp. 2990-2995 ◽  
Author(s):  
C.-M. Zetterling ◽  
M. Östling ◽  
K. Wongchotigul ◽  
M. G. Spencer ◽  
X. Tang ◽  
...  
Keyword(s):  
Silicon Carbide ◽  
Chemical Vapor Deposition ◽  
Aluminum Nitride ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition
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