Fabrication and characterization of a piezoelectric gallium nitride switch for optical MEMS applications

2012 ◽  
Vol 21 (9) ◽  
pp. 094003 ◽  
Author(s):  
Prashanth Ramesh ◽  
Sriram Krishnamoorthy ◽  
Siddharth Rajan ◽  
Gregory N Washington
2006 ◽  
Vol 17 (5) ◽  
pp. 1264-1271 ◽  
Author(s):  
Ho-Young Cha ◽  
Huaqiang Wu ◽  
Mvs Chandrashekhar ◽  
Y C Choi ◽  
S Chae ◽  
...  

Author(s):  
Prashanth Ramesh ◽  
Gregory N. Washington ◽  
Sriram Krishnamoorthy ◽  
Siddharth Rajan

The research outlined in this paper describes part of a larger effort to develop a novel branch of next-generation materials systems called Distributed Intelligent Materials Systems (DIMS) which incorporate actuation, sensing, electronics and communications modules as inherent parts of the material structure. Newer semiconductor materials that are under active research in the field of microelectronics are very well suited for such material systems. Gallium Nitride (GaN), a smart material, is pursued as a candidate material for such a system with a piezoelectrically actuated, optical microswitch being developed as the first prototypical device. This paper covers the unique electromechanical properties of GaN highlighting its differences from other piezoelectrics, the device configuration used to realize the switching device, followed by a description of and the progress made in using a nascent fabrication technology (PhotoElectroChemical Etching) used to realize the 3-dimensional device structure. Finally a low-cost, laser-based, non-contact approach to testing and characterizing the microscale device is described.


2019 ◽  
Vol 35 (4) ◽  
pp. 475-484
Author(s):  
SHIVA ARUN ◽  
◽  
PRABHA BHARTIYA ◽  
AMREEN NAZ ◽  
SUDHEER RAI ◽  
...  

2019 ◽  
Vol 139 (11) ◽  
pp. 375-380
Author(s):  
Harutoshi Takahashi ◽  
Yuta Namba ◽  
Takashi Abe ◽  
Masayuki Sohgawa

2015 ◽  
Vol 135 (11) ◽  
pp. 474-475
Author(s):  
Koji Sugano ◽  
Ryoji Hiraoka ◽  
Toshiyuki Tsuchiya ◽  
Osamu Tabata

Author(s):  
Alan Huffman ◽  
John Lannon ◽  
Matthew Lueck ◽  
Christopher Gregory ◽  
Dorota Temple

Sign in / Sign up

Export Citation Format

Share Document