Study of argon ions density and electron temperature and density in magnetron plasma by optical emission spectroscopy and collisional-radiative model
2017 ◽
Vol 3
(2)
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pp. 187-193
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1998 ◽
Vol 7
(2)
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pp. 219-229
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2011 ◽
Vol 13
(3)
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pp. 267-278
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2005 ◽
2009 ◽
Vol 43
(1)
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pp. 015202
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2013 ◽
Vol 770
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pp. 245-248
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2011 ◽
Vol 20
(6)
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pp. 1321-1327
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2002 ◽
Vol 20
(2)
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pp. 555-563
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