Effect of the admixture of N2 to low pressure, low temperature H2-CH4-CO2 microwave plasmas used for large area deposition of nanocrystalline diamond films

Journal of Physics D Applied Physics ◽

10.1088/1361-6463/aba7df ◽

2020 ◽

Vol 53 (45) ◽

pp. 455204

Author(s):

D Dekkar ◽

A Puth ◽

E Bisceglia ◽

P W P Moreira ◽

A V Pipa ◽

...

Keyword(s):

Low Temperature ◽

Diamond Films ◽

Low Pressure ◽

Nanocrystalline Diamond ◽

Microwave Plasmas ◽

Nanocrystalline Diamond Films ◽

Area Deposition

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Spectroscopic study of low pressure, low temperature H2–CH4–CO2microwave plasmas used for large area deposition of nanocrystalline diamond films. Part II: on plasma chemical processes

Plasma Sources Science and Technology ◽

10.1088/0963-0252/25/6/065003 ◽

2016 ◽

Vol 25 (6) ◽

pp. 065003 ◽

Author(s):

A S C Nave ◽

B Baudrillart ◽

S Hamann ◽

F Bénédic ◽

G Lombardi ◽

...

Keyword(s):

Low Temperature ◽

Spectroscopic Study ◽

Diamond Films ◽

Low Pressure ◽

Chemical Processes ◽

Nanocrystalline Diamond ◽

Plasma Chemical ◽

Nanocrystalline Diamond Films ◽

Area Deposition

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Spectroscopic study of low pressure, low temperature H2–CH4–CO2microwave plasmas used for large area deposition of nanocrystalline diamond films. Part I: on temperature determination and energetic aspects

Plasma Sources Science and Technology ◽

10.1088/0963-0252/25/6/065002 ◽

2016 ◽

Vol 25 (6) ◽

pp. 065002 ◽

Author(s):

A S C Nave ◽

B Baudrillart ◽

S Hamann ◽

F Bénédic ◽

G Lombardi ◽

...

Keyword(s):

Low Temperature ◽

Spectroscopic Study ◽

Diamond Films ◽

Low Pressure ◽

Nanocrystalline Diamond ◽

Temperature Determination ◽

Nanocrystalline Diamond Films ◽

Area Deposition

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Low temperature and large area deposition of nanocrystalline diamond films with distributed antenna array microwave-plasma reactor

Diamond and Related Materials ◽

10.1016/j.diamond.2014.05.004 ◽

2014 ◽

Vol 47 ◽

pp. 58-65 ◽

Author(s):

H.-A. Mehedi ◽

J. Achard ◽

D. Rats ◽

O. Brinza ◽

A. Tallaire ◽

...

Keyword(s):

Low Temperature ◽

Antenna Array ◽

Microwave Plasma ◽

Plasma Reactor ◽

Diamond Films ◽

Nanocrystalline Diamond ◽

Nanocrystalline Diamond Films ◽

Distributed Antenna ◽

Area Deposition

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Microstructure and growth kinetics of nanocrystalline diamond films deposited in large area/low temperature distributed antenna array microwave-plasma reactor

physica status solidi (a) ◽

10.1002/pssa.201532276 ◽

2015 ◽

Vol 212 (11) ◽

pp. 2611-2615 ◽

Author(s):

Benoît Baudrillart ◽

Fabien Bénédic ◽

Ovidiu Brinza ◽

Thomas Bieber ◽

Thierry Chauveau ◽

...

Keyword(s):

Low Temperature ◽

Antenna Array ◽

Growth Kinetics ◽

Microwave Plasma ◽

Plasma Reactor ◽

Diamond Films ◽

Nanocrystalline Diamond ◽

Nanocrystalline Diamond Films ◽

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Study of Low Temperature Deposition of Nanocrystalline Diamond Films on ZnO/LiNbO3 Layered Structures Suitable for Waveguiding Layer Acoustic Wave Devices

physica status solidi (a) ◽

10.1002/pssa.201800251 ◽

2018 ◽

Vol 215 (22) ◽

pp. 1800251 ◽

Author(s):

Damia Dekkar ◽

Fabien Bénédic ◽

Cécile Floer ◽

Sami Hage-Ali ◽

Ovidiu Brinza ◽

...

Keyword(s):

Low Temperature ◽

Acoustic Wave ◽

Diamond Films ◽

Layered Structures ◽

Nanocrystalline Diamond ◽

Low Temperature Deposition ◽

Nanocrystalline Diamond Films ◽

Temperature Deposition ◽

Acoustic Wave Devices

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Low-temperature thermionic emission from nitrogen-doped nanocrystalline diamond films on n-type Si grown by MPCVD

Diamond and Related Materials ◽

10.1016/j.diamond.2009.05.004 ◽

2009 ◽

Vol 18 (10) ◽

pp. 1274-1277 ◽

Author(s):

Mariko Suzuki ◽

Tomio Ono ◽

Naoshi Sakuma ◽

Tadashi Sakai

Keyword(s):

Low Temperature ◽

Diamond Films ◽

Thermionic Emission ◽

Nanocrystalline Diamond ◽

Nitrogen Doped ◽

Nanocrystalline Diamond Films

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Control of plasma space potentials and chemical vapor deposition of nanocrystalline diamond films in surface-wave excited low-pressure plasmas

Journal of Applied Physics ◽

10.1063/1.2409761 ◽

2007 ◽

Vol 101 (2) ◽

pp. 023301 ◽

Author(s):

Jaeho Kim ◽

Makoto Katsurai

Keyword(s):

Chemical Vapor Deposition ◽

Surface Wave ◽

Vapor Deposition ◽

Diamond Films ◽

Chemical Vapor ◽

Low Pressure ◽

Nanocrystalline Diamond ◽

Nanocrystalline Diamond Films

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Low-temperature deposition of nanocrystalline diamond films on silicon nitride substrates using distributed antenna array PECVD system

physica status solidi (a) ◽

10.1002/pssa.201600221 ◽

2016 ◽

Vol 213 (10) ◽

pp. 2575-2581 ◽

Author(s):

Benoît Baudrillart ◽

Fabien Bénédic ◽

Amel S. Melouani ◽

Filipe J. Oliveira ◽

Rui F. Silva ◽

...

Keyword(s):

Silicon Nitride ◽

Low Temperature ◽

Antenna Array ◽

Diamond Films ◽

Nanocrystalline Diamond ◽

Low Temperature Deposition ◽

Nanocrystalline Diamond Films ◽

Distributed Antenna ◽

Temperature Deposition

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Low temperature mechanical properties of nanocrystalline diamond films

2006 IEEE International Frequency Control Symposium and Exposition ◽

10.1109/freq.2006.275376 ◽

2006 ◽

Author(s):

Thomas H. Metcalf ◽

Brian H. Houston ◽

James E. Butler ◽

Tatyana Feygelson

Keyword(s):

Mechanical Properties ◽

Low Temperature ◽

Diamond Films ◽

Nanocrystalline Diamond ◽

Nanocrystalline Diamond Films

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Investigation of Nucleation and Growth of Nanocrystalline Diamond Films Deposited at Low Temperature Using In Situ Laser Reflectance Interferometry

physica status solidi (a) ◽

10.1002/pssa.201700205 ◽

2017 ◽

Vol 214 (11) ◽

pp. 1700205 ◽

Author(s):

Benoit Baudrillart ◽

Fabien Bénédic ◽

André Tardieu ◽

Jocelyn Achard

Keyword(s):

Low Temperature ◽

Diamond Films ◽

Nucleation And Growth ◽

Nanocrystalline Diamond ◽

Laser Reflectance ◽

Nanocrystalline Diamond Films

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