Silicon oxide-niobium oxide mixture films and nanolaminates grown by atomic layer deposition from niobium pentaethoxide and hexakis(ethylamino) disilane
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2014 ◽
Vol 3
(5)
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pp. Q89-Q94
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2018 ◽
Vol 36
(2)
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pp. 021509
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2018 ◽
Vol 36
(6)
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pp. 06A104
2015 ◽
Vol 33
(1)
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pp. 01A137
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2017 ◽
Vol 35
(1)
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pp. 01B124
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2016 ◽
Vol 120
(26)
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pp. 14149-14156
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