Numerical investigation of ion-energy-distribution functions in single and dual frequency capacitively coupled plasma reactors

2004 ◽  
Vol 69 (2) ◽  
Author(s):  
V. Georgieva ◽  
A. Bogaerts ◽  
R. Gijbels
Keyword(s):  
Energy Distribution ◽  
Numerical Investigation ◽  
Distribution Functions ◽  
Plasma Reactors ◽  
Dual Frequency ◽  
Ion Energy ◽  
Capacitively Coupled ◽  
Ion Energy Distribution ◽  
Capacitively Coupled Plasma ◽  
Energy Distribution Functions

Behavior of Time-Resolved Ion Energy Distribution Functions during Ion-Ion Instability

1993 ◽  
Vol 32 (Part 1, No. 10) ◽  
pp. 4756-4760
Author(s):  
Yoshifumi Saitou ◽  
Yoshiharu Nakamura ◽  
Masayoshi Tanaka ◽  
Akio Komori ◽  
Yoshinobu Kawai
Keyword(s):  
Energy Distribution ◽  
Distribution Functions ◽  
Time Resolved ◽  
Ion Energy ◽  
Ion Energy Distribution ◽  
Energy Distribution Functions
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