Formation tantalum coating on NiTi surface by magnetron sputtering technique
2022 ◽
Vol 2155
(1)
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pp. 012005
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Abstract The materials of research the structure and morphology of the tantalum coating on the surface of the NiTi alloy in this work presents. Tantalum was deposited by the DC - magnetron sputtering method. The influence of the energy supplied to the magnetron on the formation of the Ta-coating is shown.Changes in the structure of the coating at different stages of its formation are shown.It was found that with a significant decrease in the energy supplied to the magnetron, tantalum is deposited more uniformly. Besides the gradient of mechanical stresses in the coating is reduced.
2011 ◽
Vol 30
(4)
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pp. 333-337
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2013 ◽
Vol 27
(10)
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pp. 1112-1116
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2017 ◽
Vol 9
(5)
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pp. 05035-1-05035-6
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2005 ◽
Vol 200
(1-4)
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pp. 862-866
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2017 ◽
Vol 4
(5)
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pp. 6311-6316
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