Modeling and Alleviating Instability in a MEMS Vertical Comb Drive Using a Progressive Linkage

2005 ◽  
Author(s):  
Jessica R. Bronson ◽  
Gloria J. Wiens ◽  
James J. Allen
Keyword(s):  
Finite Element Analysis ◽  
Finite Element ◽  
Parallel Plate ◽  
Fill Factor ◽  
Electrostatic Model ◽  
Comb Drive ◽  
Element Analysis ◽  
Microelectromechanical System ◽  
Comb Drives ◽  
High Fill Factor

Micro mirrors have emerged as key components for optical microelectromechanical system (MEMS) applications. Electrostatic vertical comb drives are attractive because they can be fabricated underneath the mirror, allowing for arrays with a high fill factor. Also, vertical comb drives are more easily controlled than parallel plate actuators, making them the better choice for analog scanning devices. The device presented in this paper is a one-degree of freedom vertical comb drive fabricated using Sandia National Laboratories SUMMiT™ five-level surface micromachining process. The electrostatic performance of the device is investigated using finite element analysis to determine the capacitance for a unit cell of the comb drive as the position of the device is varied. This information is then used to design a progressive linkage that will seek to alleviate or eliminate the effects of instability. The goal of this research is to develop an electrostatic model for the behavior of the vertical comb drive mirror and then use this to design a progressive-linkage that can delay or eliminate the pull-in instability.

scholarly journals Method of Calculating the Inductance Value of MEMS Suspended Inductors with Silicon Substrates

Micromachines ◽  
2018 ◽  
Vol 9 (11) ◽  
pp. 604 ◽  
Author(s):  
Yiyuan Li ◽  
Jianhua Li ◽  
Lixin Xu
Keyword(s):  
Finite Element Analysis ◽  
Finite Element ◽  
Basic Component ◽  
Silicon Substrates ◽  
Element Analysis ◽  
Microelectromechanical System ◽  
Single Turn ◽  
Inductor Coil ◽  
Calculation Results ◽  
Rf Performance

Microelectromechanical system (MEMS) suspended inductors have excellent radio-frequency (RF) performance. The inductance value is one of the main features that characterizes the performance of inductors. It is important to consider the influence of the substrate and the suspension height in calculating the inductance value accurately. In this paper, a method is proposed to calculate the inductance value of the MEMS suspended inductor wire with a silicon substrate, as the wire is the basic component of the inductor coil. Then the method is extended to the suspended inductors consisting of a single turn coil. The calculation results obtained by this proposed method were verified by finite-element analysis (HFSS) and they were found to agree well with the results of the HFSS simulation.

scholarly journals Capacitance evaluation on parallel-plate capacitors by means of finite element analysis

2009 ◽  
Vol 1 (07) ◽  
pp. 613-616 ◽  
Author(s):  
S. Catalán Izquierdo ◽  
José M. Bueno Barrachina ◽  
César S. Cañas Peñuelas ◽  
Francisco Cavallé Sesé
Keyword(s):  
Finite Element Analysis ◽  
Finite Element ◽  
Parallel Plate ◽  
Element Analysis

scholarly journals Finite Element Analysis of the Vertical Levitation Force in an Electrostatic MEMS Comb Drive Actuator

2013 ◽  
Vol 472 ◽  
pp. 012002 ◽  
Author(s):  
J Wooldridge ◽  
J Blackburn ◽  
A Muniz-Piniella ◽  
M Stewart ◽  
T A V Shean ◽  
...  
Keyword(s):  
Finite Element Analysis ◽  
Finite Element ◽  
Levitation Force ◽  
Comb Drive ◽  
Element Analysis ◽  
Electrostatic Mems

Linear viscoelastic modelling of profiled high density polyethylene pipe

1996 ◽  
Vol 23 (2) ◽  
pp. 395-407 ◽  
Author(s):  
Ian D. Moore ◽  
Fuping Hu
Keyword(s):  
Finite Element Analysis ◽  
Finite Element ◽  
High Density Polyethylene ◽  
Parallel Plate ◽  
High Density ◽  
Time Dependent ◽  
Element Analysis ◽  
Vertical Diameter ◽  
Polyethylene Pipes ◽  
Linear Viscoelastic

Rheological model parameters for a linear viscoelastic finite element analysis are developed for corrugated polyethylene pipes. Relaxation test data from parallel plate load tests on lined corrugated high density polyethylene pipes are used, for pipes deflected to 5% and 10% vertical diameter decrease. Three-dimensional time-dependent finite element analysis is then used to estimate the time-dependent response of a 610 mm diameter pipe subjected to a constant rate of vertical diameter decrease with time. Predictions are obtained for deflection rates varying over three orders of magnitude, for direct comparison with laboratory test results. Small deflection (5%) relaxation rheology leads to good predictions of measured response up to 3% vertical pipe deflection. Large deflection (10%) rheology yields reasonable predictions for pipe response between 3% and 10% vertical deflection. Levels of strain are examined in the pipe profile, and a peak local tensile strain of 0.6% is estimated for the pipe deflected to 3% vertical diameter decrease. The rheological models should permit prediction of response under parallel plate loading for other pipe profiles. These models might also be used for estimation of pipe response under other loading conditions (such as deep burial in the field).

Analysis of Electro-Statically Driven Micro-Electro-Mechanical Systems

2006 ◽  
Vol 306-308 ◽  
pp. 1247-1252
Author(s):  
Chong Du Cho ◽  
Byung Ha Lee
Keyword(s):  
Finite Element Analysis ◽  
Finite Element ◽  
Mesh Generation ◽  
Dynamic Equation ◽  
Comb Drive ◽  
Test Vehicle ◽  
Element Analysis ◽  
Micro Electro Mechanical Systems ◽  
The Finite Element Analysis ◽  
Topography Data

In this paper, a methodology of modeling and simulating the electro-statically driven micro-electromechanical systems (MEMS) is presented, utilizing topography data with an arbitrary structure. In the methodology, the mask layout and process recipe of a device are first generated and the model then discretized by an auto-mesh generation for the finite element analysis. Finally the analysis is performed to solve the Laplace and the dynamic equation at a time. The methodology is applied to an electro-statically driven comb-drive as a test vehicle for verification.

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