scholarly journals Langmuir probe differential measurement technique in inductively coupled RF plasmas

2007 ◽  
Vol 63 ◽  
pp. 012030 ◽  
Author(s):  
I Djermanov ◽  
N Djermanova ◽  
Zh Kiss'ovski ◽  
Ts Tsankov
Keyword(s):  
Measurement Technique ◽  
Langmuir Probe ◽  
Differential Measurement ◽  
Rf Plasmas ◽  
Inductively Coupled

An analysis of LTE effects in inductively coupled RF plasmas

1989 ◽  
Vol 22 (10) ◽  
pp. 1471-1477 ◽  
Author(s):  
D V Gravelle ◽  
M Beaulieu ◽  
M I Boulos ◽  
A Gleizes
Keyword(s):  
Rf Plasmas ◽  
Inductively Coupled

Laser, spectroscopic, and Langmuir probe diagnostics of an inductively-coupled rf discharge H− ion source

1992 ◽  
Author(s):  
A. T. Young ◽  
D. A. Bachman ◽  
P. Chen ◽  
K. N. Leung ◽  
C. Y. Li ◽  
...  
Keyword(s):  
Langmuir Probe ◽  
Ion Source ◽  
Rf Discharge ◽  
Inductively Coupled ◽  
Probe Diagnostics ◽  
Laser Spectroscopic
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