Metal alkoxides as precursors for thin-film growth
1990 ◽
Vol 330
(1610)
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pp. 167-171
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Keyword(s):
Sol Gel
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The metal alkoxides [M (OR) x ] n are excellent precursor compounds for synthesizing pure metal oxides, glasses and ceramics by either the MOCVD or the sol—gel technique depending on the volatility and solubility of the metal alkoxide. Factors controlling the volatility of metal alkoxides are discussed together with possible mechanisms for the oxide deposition processes.