Generalized grazing-incidence-angle X-ray diffraction (G-GIXD) using image plates

1998 ◽  
Vol 5 (3) ◽  
pp. 488-490 ◽  
Author(s):  
Yasuo Takagi ◽  
Masao Kimura
Keyword(s):  
Incidence Angle ◽  
Incident Beam ◽  
Grazing Incidence ◽  
X Rays ◽  
X Ray Diffraction ◽  
X Ray ◽  
Surface And Interface ◽  
Out Of Plane ◽  
Grazing Incidence Angle ◽  
Interface Layers

A new and more `generalized' grazing-incidence-angle X-ray diffraction (G-GIXD) method which enables simultaneous measurements both of in- and out-of-plane diffraction images from surface and interface structures has been developed. While the method uses grazing-incidence-angle X-rays like synchrotron radiation as an incident beam in the same manner as in `traditional' GIXD, two-dimensional (area) detectors like image plates and a spherical-type goniometer are used as the data-collection system. In this way, diffraction images both in the Seemann–Bohlin (out-of-plane) and GIXD geometry (in-plane) can be measured simultaneously without scanning the detectors. The method can be applied not only to the analysis of the in-plane crystal structure of epitaxically grown thin films, but also to more general research topics like the structural analysis of polycrystalline mixed phases of thin surface and interface layers.

scholarly journals Multiple scattering in grazing-incidence X-ray diffraction: impact on lattice-constant determination in thin films

2016 ◽  
Vol 23 (3) ◽  
pp. 729-734 ◽  
Author(s):  
Roland Resel ◽  
Markus Bainschab ◽  
Alexander Pichler ◽  
Theo Dingemans ◽  
Clemens Simbrunner ◽  
...  
Keyword(s):  
Thin Films ◽  
Critical Angle ◽  
Grazing Incidence ◽  
X Rays ◽  
Organic Thin Film ◽  
X Ray Diffraction ◽  
Reliable Determination ◽  
X Ray ◽  
Out Of Plane

Dynamical scattering effects are observed in grazing-incidence X-ray diffraction experiments using an organic thin film of 2,2′:6′,2′′-ternaphthalene grown on oxidized silicon as substrate. Here, a splitting of all Bragg peaks in the out-of-plane direction (z-direction) has been observed, the magnitude of which depends both on the incidence angle of the primary beam and the out-of-plane angle of the scattered beam. The incident angle was varied between 0.09° and 0.25° for synchrotron radiation of 10.5 keV. This study reveals comparable intensities of the split peaks with a maximum for incidence angles close to the critical angle of total external reflection of the substrate. This observation is rationalized by two different scattering pathways resulting in diffraction peaks at different positions at the detector. In order to minimize the splitting, the data suggest either using incident angles well below the critical angle of total reflection or angles well above, which sufficiently attenuates the contributions from the second scattering path. This study highlights that the refraction of X-rays in (organic) thin films has to be corrected accordingly to allow for the determination of peak positions with sufficient accuracy. Based thereon, a reliable determination of the lattice constants becomes feasible, which is required for crystallographic structure solutions from thin films.

Structural Characterization of GaN Epilayers Grown on Patterned Sapphire Substrates

2005 ◽  
Vol 864 ◽  
Author(s):  
Chang-Soo Kim ◽  
Ji-Hyun Moon ◽  
Sang-Jun Lee ◽  
Sam-Kyu Noh ◽  
Je Won Kim ◽  
...  
Keyword(s):  
Incidence Angle ◽  
Surface Region ◽  
Grazing Incidence ◽  
X Rays ◽  
X Ray Diffraction ◽  
X Ray ◽  
Patterned Substrate ◽  
Sapphire Substrates ◽  
Patterned Sapphire Substrates

AbstractThe structural properties of GaN epitaxial layers grown on patterned sapphire substrates by MOCVD have been investigated using HRXRD(high-resolution X-ray diffraction), GIXRD(grazing incidence X-ray diffraction) and PL(photoluminescence). For X-ray characterizations rocking curves for GaN (10·5), (00·2), (11·4) and (11·0) reflections for which incidence angles of X-rays are 32.0°, 17.3°, 11.0° and 0.34°, respectively, were measured. For (10·5), (00·2) and (11·4) reflections FWHMs of the rocking curves for a patterned substrate were broader than those for a unpatterned substrate, for (11·0) reflection, however, FWHM for a patterned substrate was much narrower than that for a unpatterned substrate. The normalized FWHM for all reflections decreases as the incidence angle of X-ray decreases. The results indicate that the crystalline quality in the surface region of the epilayer on a patterned substrate was especially improved because the penetration depth of X-ray depends on the incidence angle. The intensity of PL peak of the epilayer for a patterned substrate increased compared to that for a unpatterned substrate, and the increase in PL intensity is attributed to the reduction in dislocation density at the surface region revealed the by X-ray results.

Imaging X-ray fluorescence microscope with a Wolter-type grazing-incidence mirror

1998 ◽  
Vol 5 (3) ◽  
pp. 1117-1118 ◽  
Author(s):  
S. Aoki ◽  
A. Takeuchi ◽  
M. Ando
Keyword(s):  
Spatial Resolution ◽  
Incidence Angle ◽  
Grazing Incidence ◽  
Fluorescence Microscope ◽  
X Rays ◽  
X Ray ◽  
Photon Factory ◽  
Grazing Incidence Angle ◽  
Fluorescence Images ◽  
Better Than

A Wolter-type grazing-incidence mirror was used as an objective for an imaging X-ray fluorescence microscope. The microscope was constructed at the beamline 6C2 of the Photon Factory. The shortest wavelength used was ∼0. 1 nm, which was limited by the grazing-incidence angle of the mirror. To demonstrate the possibility of recording X-ray fluorescence images, several fine grids were used as test specimens. Characteristic X-rays emitted from each specimen could be clearly imaged. Spatial resolution was estimated to be better than 10 µm.

Generalized Grazing Incidence-Angle X-Ray Diffraction Studies on InAs Quantum Dots on Si (100) Substrates

2000 ◽  
Vol 39 (Part 1, No. 7B) ◽  
pp. 4483-4485 ◽  
Author(s):  
Takeshi Uragami ◽  
Hiroshi Fujioka ◽  
Ichitaro Waki ◽  
Takaaki Mano ◽  
Kanta Ono ◽  
...  
Keyword(s):  
Quantum Dots ◽  
Incidence Angle ◽  
Grazing Incidence ◽  
X Ray Diffraction ◽  
Inas Quantum Dots ◽  
X Ray ◽  
Grazing Incidence Angle

Characterization of Interfacial Roughness in Semiconductor Heterostructures by X-Ray Reflectivity

1987 ◽  
Vol 103 ◽  
Author(s):  
A. Krol ◽  
C. J. Sher ◽  
H. Resat ◽  
S. C. Woronick ◽  
W. Ng ◽  
...  
Keyword(s):  
Molecular Beam Epitaxy ◽  
Molecular Beam ◽  
Incidence Angle ◽  
Grazing Incidence ◽  
Semiconductor Heterostructures ◽  
X Rays ◽  
Interfacial Roughness ◽  
X Ray ◽  
Grazing Incidence Angle

ABSTRACTThe reflection of monochromatic x-rays by a layered heterostructure can be utilized as a nondestructive probe to obtain information on the interfacial roughness in the material. Interference between x-rays reflected from the top surface and the interfaces can give rise to pronounced oscillations in the reflectivity as a function of the grazing incidence angle. We have made use of this technique to investigate the interfacial roughness in semiconductor heterostructures grown by molecular beam epitaxy.

Application of Graded Multilayer Optics in X-Ray Diffraction

1995 ◽  
Vol 39 ◽  
pp. 57-71 ◽  
Author(s):  
M. Schuster ◽  
H. Göbel
Keyword(s):  
Incidence Angle ◽  
Bragg Reflection ◽  
Incident Beam ◽  
Grazing Incidence ◽  
Small Dimension ◽  
X Ray Diffraction ◽  
Parallel Beam ◽  
Multilayer Mirrors ◽  
X Ray ◽  
Focused Beam

Periodic multilayers are ideally suited as high-reflectivity and wide-bandwidth Bragg reflectors. Their period can be matched laterally to the incidence angle so that for all points on the reflector, Bragg reflection is obtained for the same wavelength. Three major types of laterally graded multilayer optics were appJied to X-ray diffraction: (i) Parabolically curved multilayer mirrors were used to convert divergent radiation emerging from an X-ray source into a parallel beam. The parallel beam was applied in powder diffraction, grazing incidence diffraction, reflectometry, high-resolution diffraction, and protein crystallography, (ii) Elliptically curved multilayer mirrors focused the divergent radiation from the source into a line on the sample or detector. The high brilliance and small dimension of the focused beam make this mirror type suited for transmission diffractometry of capillary and fiber specimens, (iii) Planar multilayer mirrors were employed in divergent-beam optics. In Bragg-Brentano diffractometers, this mirror type can serve as a compact incident-beam monochromator for removing Kβ lines and Bremsstrahlung.

scholarly journals Refitting an X-ray diffraction system for combined GIXRF and XRR measurements

2020 ◽  
Vol 35 (S1) ◽  
pp. S29-S33
Author(s):  
Dieter Ingerle ◽  
Werner Artner ◽  
Klaudia Hradil ◽  
Christina Streli
Keyword(s):  
Incident Beam ◽  
Fluorescence Analysis ◽  
Grazing Incidence ◽  
Performance Criteria ◽  
Nickel Layer ◽  
Beam Optics ◽  
X Ray Diffraction ◽  
X Ray ◽  
Special Software ◽  
Spectrometer Data

A commercial Empyrean X-ray diffractometer was adapted for combined grazing incidence X-ray fluorescence analysis (GIXRF) measurements with X-ray reflectivity (XRR) measurements. An energy-dispersive silicon drift detector was mounted and integrated in the angle-dependent data acquisition of the Empyrean. Different monochromator/X-ray optics units have been compared with the values obtained by the Atominstitut GIXRF + XRR spectrometer. Data evaluation was performed by JGIXA, a special software for combined GIXRF + XRR data fitting, developed at Atominstitut. A sample consisting of a ~50 nm nickel layer on a silicon substrate was used to compare the performance criteria (i.e. divergence and intensity) of the incident beam optics. An Empyrean X-ray diffractometer was successfully refitted to measure both GIXRF and XRR data.

X-RAY DIFFRACTION FOR SURFACES AND BURIED INTERFACES

2000 ◽  
Vol 07 (04) ◽  
pp. 437-446 ◽  
Author(s):  
G. RENAUD
Keyword(s):  
Grazing Incidence ◽  
X Rays ◽  
X Ray Diffraction ◽  
X Ray ◽  
Grain Sizes ◽  
Buried Interfaces ◽  
Surfaces And Interfaces ◽  
Coherent Interfaces

The application of X-rays to the structural characterization of surfaces and interfaces, in situ and in UHV, is discussed on selected examples. Grazing incidence X-ray diffraction is not only a very powerful technique for quantitatively investigating the atomic structure of surfaces and interfaces, but is also very useful for providing information on the interfacial registry for coherent interfaces or on the strain deformation, island and grain sizes for incoherent epilayers.

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