scholarly journals Grazing-incidence small-angle X-ray scattering (GISAXS) on small periodic targets using large beams

IUCrJ ◽  
2017 ◽  
Vol 4 (4) ◽  
pp. 431-438 ◽  
Author(s):  
Mika Pflüger ◽  
Victor Soltwisch ◽  
Jürgen Probst ◽  
Frank Scholze ◽  
Michael Krumrey

Grazing-incidence small-angle X-ray scattering (GISAXS) is often used as a versatile tool for the contactless and destruction-free investigation of nanostructured surfaces. However, due to the shallow incidence angles, the footprint of the X-ray beam is significantly elongated, limiting GISAXS to samples with typical target lengths of several millimetres. For many potential applications, the production of large target areas is impractical, and the targets are surrounded by structured areas. Because the beam footprint is larger than the targets, the surrounding structures contribute parasitic scattering, burying the target signal. In this paper, GISAXS measurements of isolated as well as surrounded grating targets in Si substrates with line lengths from 50 µm down to 4 µm are presented. For the isolated grating targets, the changes in the scattering patterns due to the reduced target length are explained. For the surrounded grating targets, the scattering signal of a 15 µm × 15 µm target grating structure is separated from the scattering signal of 100 µm × 100 µm nanostructured surroundings by producing the target with a different orientation with respect to the predominant direction of the surrounding structures. As virtually all lithographically produced nanostructures have a predominant direction, the described technique allows GISAXS to be applied in a range of applications,e.g. for characterization of metrology fields in the semiconductor industry, where up to now it has been considered impossible to use this method due to the large beam footprint.

2020 ◽  
Vol 91 (12) ◽  
pp. 123501
Author(s):  
M. Šmíd ◽  
C. Baehtz ◽  
A. Pelka ◽  
A. Laso García ◽  
S. Göde ◽  
...  

2014 ◽  
Vol 115 (20) ◽  
pp. 204311 ◽  
Author(s):  
Nie Zhao ◽  
Chunming Yang ◽  
Qian Zhang ◽  
Xueming Lu ◽  
Yuzhu Wang ◽  
...  

1999 ◽  
Vol 86 (12) ◽  
pp. 6763-6769 ◽  
Author(s):  
Markus Rauscher ◽  
Rogerio Paniago ◽  
Hartmut Metzger ◽  
Zoltan Kovats ◽  
Jan Domke ◽  
...  

2007 ◽  
Vol 78 (11) ◽  
pp. 113910 ◽  
Author(s):  
M. A. Singh ◽  
M. N. Groves ◽  
M. S. Müller ◽  
I. J. Stahlbrand ◽  
D.-M. Smilgies

2010 ◽  
Vol 22 (47) ◽  
pp. 474003 ◽  
Author(s):  
Hiroshi Okuda ◽  
Masayuki Kato ◽  
Keiji Kuno ◽  
Shojiro Ochiai ◽  
Noritaka Usami ◽  
...  

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