Quantum interference devices fabricated using molecular-beam epitaxy and ultra-high-resolution electron-beam lithography

1989 ◽  
Vol 36 (11) ◽  
pp. 2617-2618
Author(s):  
S.Y. Chou ◽  
D.R. Alee ◽  
R.F.W. Pease ◽  
J.S. Harris
Keyword(s):  
Electron Beam ◽  
High Resolution ◽  
Molecular Beam Epitaxy ◽  
Electron Beam Lithography ◽  
Quantum Interference ◽  
Molecular Beam ◽  
Resolution Electron

High resolution electron microscopy study of molecular beam epitaxy grown CoSi2/Si1−xGex/Si(100) heterostructures

1999 ◽  
Vol 85 (4) ◽  
pp. 2119-2123 ◽  
Author(s):  
V. Buschmann ◽  
M. Rodewald ◽  
H. Fuess ◽  
G. Van Tendeloo ◽  
C. Schäffer
Keyword(s):  
Electron Microscopy ◽  
High Resolution ◽  
Molecular Beam Epitaxy ◽  
Molecular Beam ◽  
High Resolution Electron Microscopy ◽  
Microscopy Study ◽  
Electron Microscopy Study ◽  
Resolution Electron

High resolution electron beam lithography on CaF2

1984 ◽  
Vol 44 (4) ◽  
pp. 468-469 ◽  
Author(s):  
P. M. Mankiewich ◽  
H. G. Craighead ◽  
T. R. Harrison ◽  
A. H. Dayem
Keyword(s):  
Electron Beam ◽  
High Resolution ◽  
Electron Beam Lithography ◽  
Resolution Electron

Realization of ultra-thin HSQ resist layer for high resolution electron beam lithography using liquid splitting process

2014 ◽  
Vol 123 ◽  
pp. 62-64
Author(s):  
Jung Wuk Kim ◽  
Jens Bolten ◽  
Christian Moormann ◽  
Heinrich Kurz
Keyword(s):  
Electron Beam ◽  
High Resolution ◽  
Electron Beam Lithography ◽  
Resolution Electron ◽  
Splitting Process

scholarly journals mr-PosEBR: a novel positive tone resist for high resolution electron beam lithography and 3D surface patterning

2016 ◽  
Author(s):  
Stefan Pfirrmann ◽  
Robert Kirchner ◽  
Olga Lohse ◽  
Vitaliy A. Guzenko ◽  
Anja Voigt ◽  
...  
Keyword(s):  
Electron Beam ◽  
High Resolution ◽  
Electron Beam Lithography ◽  
Surface Patterning ◽  
3D Surface ◽  
Resolution Electron

High resolution electron beam lithography with a polydiacetylene negative resist at 50 kV

1991 ◽  
Vol 70 (3) ◽  
pp. 1793-1799 ◽  
Author(s):  
E. A. Dobisz ◽  
C. R. K. Marrian ◽  
R. J. Colton
Keyword(s):  
Electron Beam ◽  
High Resolution ◽  
Electron Beam Lithography ◽  
Resolution Electron
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