The effects of electrical stress and temperature on the properties of polycrystalline silicon thin-film transistors fabricated by metal induced lateral crystallization

Effect of Dopant Concentration in Lightly Doped Drain Region on the Electrical Properties of N-Type Metal Induced Lateral Crystallization Polycrystalline Silicon Thin Film Transistors

10.7567/jjap.52.10mc13 ◽

2013 ◽

Vol 52 (10S) ◽

pp. 10MC13 ◽

Author(s):

Se Wan Son ◽

Chang Woo Byun ◽

Yong Woo Lee ◽

Seung Jae Yun ◽

Ashkan Vakilipour Takaloo ◽

...

Keyword(s):

Thin Film ◽

Electrical Properties ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Dopant Concentration ◽

Silicon Thin Film ◽

Drain Region ◽

Lateral Crystallization ◽

Lightly Doped Drain

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

Electrical characteristics of polycrystalline silicon thin film transistors using the Cu-field aided lateral crystallization process

10.1116/1.1491552 ◽

2002 ◽

Vol 20 (4) ◽

pp. 1427 ◽

Author(s):

Se-Youl Kwon ◽

Kyoung-Wan Park ◽

Jae-Bok Lee ◽

Duck-Kyun Choi

Keyword(s):

Thin Film ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Crystallization Process ◽

Electrical Characteristics ◽

Silicon Thin Film ◽

Fabrication and characterization of low temperature polycrystalline silicon thin film transistors by ink-jet printed nickel-mediated lateral crystallization

Applied Physics Letters ◽

10.1063/1.3105983 ◽

2009 ◽

Vol 94 (12) ◽

pp. 122105 ◽

Cited By ~ 7

Author(s):

Jang-Sik Lee ◽

Min-Sun Kim ◽

Dongjo Kim ◽

Yong-Mu Kim ◽

Jooho Moon ◽

...

Keyword(s):

Thin Film ◽

Low Temperature ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Silicon Thin Film ◽

Ink Jet ◽

Fabrication And Characterization ◽

High-Performance Polycrystalline Silicon Thin Film Transistors on Non-Alkali Glass Produced Using Continuous Wave Laser Lateral Crystallization

10.1143/jjap.41.l311 ◽

2002 ◽

Vol 41 (Part 2, No. 3B) ◽

pp. L311-L313 ◽

Cited By ~ 86

Author(s):

Akito Hara ◽

Fumiyo Takeuchi ◽

Michiko Takei ◽

Katsuyuki Suga ◽

Kenichi Yoshino ◽

...

Keyword(s):

Thin Film ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

High Performance ◽

Continuous Wave ◽

Continuous Wave Laser ◽

Silicon Thin Film ◽

Alkali Glass ◽

Wave Laser ◽

(Invited) Self-Aligned Four-Terminal Low-Temperature Polycrystalline-Silicon Thin-Film Transistors on Glass Substrate Using Continuous-Wave Laser Lateral Crystallization

ECS Transactions ◽

10.1149/07510.0037ecst ◽

2016 ◽

Vol 75 (10) ◽

pp. 37-47 ◽

Author(s):

A. Hara ◽

H. Ohsawa

Keyword(s):

Thin Film ◽

Low Temperature ◽

Glass Substrate ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Continuous Wave ◽

Continuous Wave Laser ◽

Silicon Thin Film ◽

Wave Laser ◽

Tri-Gate Polycrystalline Silicon Thin-Film Transistors Fabricated by Continuous-Wave Laser Lateral Crystallization with Improved Electron Transport Properties

10.7567/jjap.51.02bj03 ◽

2012 ◽

Vol 51 (2S) ◽

pp. 02BJ03 ◽

Cited By ~ 9

Author(s):

Shuntaro Fujii ◽

Shin-Ichiro Kuroki ◽

Yuya Kawasaki ◽

Koji Kotani

Keyword(s):

Thin Film ◽

Electron Transport ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Continuous Wave ◽

Continuous Wave Laser ◽

Silicon Thin Film ◽

Electron Transport Properties ◽

Wave Laser ◽

2005 IEEE International Reliability Physics Symposium, 2005. Proceedings. 43rd Annual. ◽

Mechanism of on-current and off-current instabilities under electrical stress in polycrystalline silicon thin-film transistors

10.1109/relphy.2005.1493213 ◽

2005 ◽

Author(s):

Shen De Wang ◽

Tzu Yon Chang ◽

Wei Hsiang Lo ◽

Tan Fu Lei

Keyword(s):

Thin Film ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Silicon Thin Film ◽

Electrical Stress

Drain/Gate-Voltage-Dependent On-Current and Off-Current Instabilities in Polycrystalline Silicon Thin-Film Transistors under Electrical Stress

10.1143/jjap.44.6435 ◽

2005 ◽

Vol 44 (9A) ◽

pp. 6435-6440 ◽

Cited By ~ 6

Author(s):

Shen De Wang ◽

Tzu Yun Chang ◽

Wei Hsiang Lo ◽

Jen Yi Sang ◽

Tan Fu Lei

Keyword(s):

Thin Film ◽

Gate Voltage ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Silicon Thin Film ◽

Electrical Stress ◽

Voltage Dependent

High Performance Low Temperature Polycrystalline Silicon Thin Film Transistors on Non-alkaline Glass Produced Using Diode Pumped Solid State Continuous Wave Laser Lateral Crystallization

10.1143/jjap.43.1269 ◽

2004 ◽

Vol 43 (4A) ◽

pp. 1269-1276 ◽

Cited By ~ 97

Author(s):

Akito Hara ◽

Michiko Takei ◽

Fumiyo Takeuchi ◽

Katsuyuki Suga ◽

Kenichi Yoshino ◽

...

Keyword(s):

Thin Film ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

High Performance ◽

Continuous Wave ◽

Continuous Wave Laser ◽

Silicon Thin Film ◽

Diode Pumped ◽

Wave Laser ◽

Low-Temperature Polycrystalline-Silicon Thin-Film Transistors Fabricated by Continuous-Wave Laser Lateral Crystallization and Metal/Hafnium Oxide Gate Stack on Nonalkaline Glass Substrate

IEICE Transactions on Electronics ◽

10.1587/transele.e100.c.94 ◽

2017 ◽

Vol E100.C (1) ◽

pp. 94-100 ◽

Author(s):

Tatsuya MEGURO ◽

Akito HARA

Keyword(s):

Thin Film ◽

Low Temperature ◽

Thin Film Transistors ◽

Hafnium Oxide ◽

Polycrystalline Silicon ◽

Continuous Wave ◽

Continuous Wave Laser ◽

Silicon Thin Film ◽

Wave Laser ◽