Real time, in situ measurement of film thickness with reflexion supported pyrometric interferometry (RSPI)

2002 ◽  
Author(s):  
F.G. Boebel ◽  
B. Hertel ◽  
H. Moller ◽  
W. Preiss ◽  
G. Ritter
Keyword(s):  
Film Thickness ◽  
Real Time ◽  
In Situ Measurement

scholarly journals Real-time, in-situ measurement of film thickness and uniformity during plasma ashing of photoresist

1991 ◽  
Author(s):  
John T. Davies ◽  
Thomas E. Metz ◽  
Richard N. Savage ◽  
Horace O. Simmons
Keyword(s):  
Film Thickness ◽  
Real Time ◽  
In Situ Measurement

scholarly journals In-situ measurement of water-vapor in fire environments using a real-time tunable diode laser based system

2020 ◽  
pp. 103114
Author(s):  
Shruti Ghanekar ◽  
Rajavasanth Rajasegar ◽  
Nicholas Traina ◽  
Constandinos Mitsingas ◽  
Richard M. Kesler ◽  
...  
Keyword(s):  
Water Vapor ◽  
Real Time ◽  
Diode Laser ◽  
In Situ Measurement ◽  
Tunable Diode Laser ◽  
In Fire

In Situ Observation of Formation Behavior of Adsorption Film in the Narrow Space Using Surface Plasmon Resonance (SPR) Method

2017 ◽  
Vol 739 ◽  
pp. 56-62
Author(s):  
Koki Fukuta ◽  
Satoru Maegawa ◽  
Fumihiro Itoigawa ◽  
Takashi Nakamura
Keyword(s):  
Surface Plasmon Resonance ◽  
Film Thickness ◽  
Real Time ◽  
Surface Plasmon ◽  
Plasmon Resonance ◽  
Film Growth ◽  
High Sensitivity ◽  
Adsorption Film ◽  
Base Oil

In this paper, an application of the surface plasmon resonance (SPR) method to real-time and in-situ measurements of changes in adsorption film thickness, e.g., fatty acid adsorbed films, is presented. As discussed in the previous study, the high sensitivity and overall simplicity of its optical system make the SPR method advantageous for monitoring lubricant film thickness. In order to demonstrate the high sensitivity of the SPR method, in-situ and real-time adsorption film growth processes of stearic acid (additives) in hexadecane (base oil) were monitored using the Otto configuration. Based on a comparison between experimental and model calculation results, changes in the adsorption film thickness during a series of different contact tests were measured.

A Method For In-Situ Measurement Of The Film Thickness And Composition Of Films Deposited by Gas Injection In The FIB-SEM

2012 ◽  
Vol 18 (S2) ◽  
pp. 620-621 ◽  
Author(s):  
C. Lang ◽  
S. Burgess ◽  
G. Kerr ◽  
P. Statham ◽  
C. Hartfield ◽  
...  
Keyword(s):  
Film Thickness ◽  
Gas Injection ◽  
In Situ Measurement

Extended abstract of a paper presented at Microscopy and Microanalysis 2012 in Phoenix, Arizona, USA, July 29 – August 2, 2012.

Quantitative in situ measurement of transfer film thickness by a Newton's rings method

Wear ◽  
2008 ◽  
Vol 264 (7-8) ◽  
pp. 731-736 ◽  
Author(s):  
Kathryn J. Wahl ◽  
Richard R. Chromik ◽  
Gun Young Lee
Keyword(s):  
Film Thickness ◽  
Transfer Film ◽  
In Situ Measurement
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