ABSTRACTIndium, tin, antimony and aluminum are deposited by an electrochemical process into the pores of n-type porous silicon which is anodized with ultraviolet light applied during formation. The presence of these metal atoms in the porous layer is checked by electron microprobe measurement. As reported previously, UV-light etched material shows red photoluminescence (630 nm) and blue electroluminescence (470 nm) without the metal treatment. After metal deposition the photoluminescence intensity decreases slightly (factor 0.5 - 0.8), whereas the spectral position remains constant. The electroluminescence efficiency is significantly enhanced by indium, aluminum and tin in the pores (factor 5 - 90). The tin and antimony treatment causes a red shift to 580 nm and 740 nm, respectively. The conductivity is slightly increased by all kinds of metals by a factor 2-5.
