В работе методами растровой электронной микроскопии и ультрамягкойрентгеновской эмиссионной спектроскопии были проведены исследования особенностейформирования многослойных структур пористого кремния и установлено влияние изменения плотности тока при электрохимическом травлении монокристаллических пластин кремния на фазовый состав поверхностных слоев сформированной пористой структуры.
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Multiparametric Porous Silicon Sensors