Research on Internal Temperature Distribution of Crystals in CZ Silicon Single Crystal Growth Process Based on Finite Element Model

2019 Chinese Automation Congress (CAC) ◽

10.1109/cac48633.2019.8997216 ◽

2019 ◽

Author(s):

Yin Wan ◽

Ding Liu ◽

Jun-Chao Ren ◽

Cong-Cong Liu

Keyword(s):

Finite Element ◽

Crystal Growth ◽

Temperature Distribution ◽

Finite Element Model ◽

Growth Process ◽

Element Model ◽

Single Crystal Growth ◽

Silicon Single Crystal ◽

Internal Temperature ◽

Crystal Growth Process

Download Full-text

A simplified finite element model for numerical simulation of temperature field and optimization of parameters in single crystal growth by optical floating zone technique

Journal of Crystal Growth ◽

10.1016/j.jcrysgro.2016.09.026 ◽

2017 ◽

Vol 468 ◽

pp. 923-932 ◽

Author(s):

Yinzhou Yan ◽

Mengjie Shi ◽

Qiang Wang ◽

Yijian Jiang

Keyword(s):

Numerical Simulation ◽

Finite Element ◽

Temperature Field ◽

Crystal Growth ◽

Finite Element Model ◽

Element Model ◽

Single Crystal Growth ◽

Floating Zone ◽

Optimization Of Parameters ◽

Simplified Finite Element Model

Download Full-text

Finite element simulation of single crystal growth process using GSMAC method

Journal of Computational and Applied Mathematics ◽

10.1016/s0377-0427(02)00543-5 ◽

2002 ◽

Vol 149 (1) ◽

pp. 359-371 ◽

Author(s):

H Kohno ◽

T Tanahashi

Keyword(s):

Finite Element ◽

Crystal Growth ◽

Single Crystal ◽

Finite Element Simulation ◽

Growth Process ◽

Single Crystal Growth ◽

Crystal Growth Process ◽

Element Simulation

Download Full-text

Hybrid integrated modeling of thermal field temperature in Cz silicon single crystal growth process based on VMD-CNN-LSTM-ELM

10.23919/ccc52363.2021.9549392 ◽

2021 ◽

Author(s):

Yin Wan ◽

Ding Liu ◽

Junchao Ren

Keyword(s):

Crystal Growth ◽

Single Crystal ◽

Growth Process ◽

Thermal Field ◽

Single Crystal Growth ◽

Silicon Single Crystal ◽

Integrated Modeling ◽

Crystal Growth Process ◽

Field Temperature

Download Full-text

Optimization of the Crystal Surface Temperature Distribution in the Single-Crystal Growth Process by the Czochralski Method

Journal of Computational Physics ◽

10.1006/jcph.2002.7011 ◽

2002 ◽

Vol 177 (2) ◽

pp. 284-312 ◽

Author(s):

Ja Hoon Jeong ◽

In Seok Kang

Keyword(s):

Crystal Growth ◽

Temperature Distribution ◽

Surface Temperature ◽

Single Crystal ◽

Growth Process ◽

Crystal Surface ◽

Czochralski Method ◽

Single Crystal Growth ◽

Surface Temperature Distribution ◽

Crystal Growth Process

Download Full-text

Marangoni Effect in Material Engineering. Marangoni Effect in Silicon Single Crystal Growth Process.

Materia Japan ◽

10.2320/materia.34.420 ◽

1995 ◽

Vol 34 (4) ◽

pp. 420-425

Author(s):

Koichi Kakimoto

Keyword(s):

Crystal Growth ◽

Single Crystal ◽

Growth Process ◽

Marangoni Effect ◽

Single Crystal Growth ◽

Silicon Single Crystal ◽

Material Engineering ◽

Crystal Growth Process

Download Full-text

Dislocation density analysis of single crystal growth process by three-dimensional finite element method

The Proceedings of The Computational Mechanics Conference ◽

10.1299/jsmecmd.2004.17.627 ◽

2004 ◽

Vol 2004.17 (0) ◽

pp. 627-628

Author(s):

Yusuke KIMURA ◽

Noriyuki MIYAZAKI

Keyword(s):

Finite Element Method ◽

Finite Element ◽

Crystal Growth ◽

Growth Process ◽

Three Dimensional ◽

Single Crystal Growth ◽

Crystal Growth Process ◽

Dimensional Finite Element ◽

Density Analysis ◽

Three Dimensional Finite Element

Download Full-text

Diameter Model Identification of CZ Silicon Single Crystal Growth Process

2018 Chinese Automation Congress (CAC) ◽

10.1109/cac.2018.8623498 ◽

2018 ◽

Author(s):

Qin-Wei Tang ◽

Jing ZHANG ◽

Ding LUI

Keyword(s):

Crystal Growth ◽

Single Crystal ◽

Growth Process ◽

Model Identification ◽

Single Crystal Growth ◽

Silicon Single Crystal ◽

Crystal Growth Process

Download Full-text

Data-driven model predictive control of Cz silicon single crystal growth process with V/G value soft measurement model

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2021.3088855 ◽

2021 ◽

pp. 1-1

Author(s):

Yin Wan ◽

Ding Liu ◽

Cong-Cong Liu ◽

Jun-Chao Ren

Keyword(s):

Crystal Growth ◽

Predictive Control ◽

Growth Process ◽

Measurement Model ◽

Single Crystal Growth ◽

Silicon Single Crystal ◽

Data Driven ◽

Crystal Growth Process ◽

Soft Measurement ◽

Download Full-text

Modeling and application of Czochralski silicon single crystal growth process using hybrid model of data-driven and mechanism-based methodologies

Journal of Process Control ◽

10.1016/j.jprocont.2021.06.002 ◽

2021 ◽

Vol 104 ◽

pp. 74-85

Author(s):

Jun-Chao Ren ◽

Ding Liu ◽

Yin Wan

Keyword(s):

Crystal Growth ◽

Single Crystal ◽

Hybrid Model ◽

Growth Process ◽

Single Crystal Growth ◽

Silicon Single Crystal ◽

Data Driven ◽

Czochralski Silicon ◽

Crystal Growth Process

Download Full-text

Finite element model to study temperature distribution in skin and deep tissues of human limbs

Journal of Thermal Biology ◽

10.1016/j.jtherbio.2016.07.006 ◽

2016 ◽

Vol 62 ◽

pp. 98-105 ◽

Author(s):

Mamta Agrawal ◽

K.R. Pardasani

Keyword(s):

Finite Element ◽

Temperature Distribution ◽

Finite Element Model ◽

Download Full-text