Fabrication of multi-layer, high-density micro-electrode arrays for neural stimulation and bio-signal recording

Author(s):  
G.J. Suaning ◽  
M. Schuettler ◽  
J.S. Ordonez ◽  
N.H. Lovell
2012 ◽  
Vol 207 (2) ◽  
pp. 161-171 ◽  
Author(s):  
Alessandro Maccione ◽  
Matteo Garofalo ◽  
Thierry Nieus ◽  
Mariateresa Tedesco ◽  
Luca Berdondini ◽  
...  

2021 ◽  
Author(s):  
Jens Duru ◽  
Joel Kuechler ◽  
Stephan Johannes Ihle ◽  
Csaba Forro ◽  
Aeneas Bernardi ◽  
...  

In bottom-up neuroscience, questions on neural information processing are addressed by engineering small but reproducible biological neural networks of defined network topology \textit{in vitro}. The network topology can be controlled by culturing neurons within polydimethylsiloxane (PDMS) microstructures that are combined with microelectrode arrays (MEAs) for electric access to the network. However, currently used glass MEAs are limited to 256 electrodes and pose a limitation to the spatial resolution as well as the design of more complex microstructures. The use of high density complementary metal-oxide-semiconductor (CMOS) MEAs greatly increases the spatiotemporal resolution, enabling sub-cellular readout and stimulation of neurons in defined neural networks. Unfortunately, the non-planar surface of CMOS MEAs complicates the attachment of PDMS microstructures. To overcome the problem of axons escaping the microstructures through the ridges of the CMOS MEA, we stamp-transferred a thin film of hexane-diluted PDMS onto the array such that the PDMS filled the ridges at the contact surface of the microstructures without clogging the axon guidance channels. Moreover, we provide an impedance-based method to visualize the exact location of the microstructures on the MEA and show that our method can confine axonal growth within the PDMS microstructures. Finally, the high spatiotemporal resolution of the CMOS MEA enabled us to show that we can guide action potentials using the unidirectional topology of our circular multi-node microstructure.


2019 ◽  
Author(s):  
Fabio Boi ◽  
Nikolas Perentos ◽  
Aziliz Lecomte ◽  
Gerrit Schwesig ◽  
Stefano Zordan ◽  
...  

AbstractThe advent of implantable active dense CMOS neural probes opened a new era for electrophysiology in neuroscience. These single shank electrode arrays, and the emerging tailored analysis tools, provide for the first time to neuroscientists the neurotechnology means to spatiotemporally resolve the activity of hundreds of different single-neurons in multiple vertically aligned brain structures. However, while these unprecedented experimental capabilities to study columnar brain properties are a big leap forward in neuroscience, there is the need to spatially distribute electrodes also horizontally. Closely spacing and consistently placing in well-defined geometrical arrangement multiple isolated single-shank probes is methodologically and economically impractical. Here, we present the first high-density CMOS neural probe with multiple shanks integrating thousand’s of closely spaced and simultaneously recording microelectrodes to map neural activity across 2D lattice. Taking advantage from the high-modularity of our electrode-pixels-based SiNAPS technology, we realized a four shanks active dense probe with 256 electrode-pixels/shank and a pitch of 28 µm, for a total of 1024 simultaneously recording channels. The achieved performances allow for full-band, whole-array read-outs at 25 kHz/channel, show a measured input referred noise in the action potential band (300-7000 Hz) of 6.5 ± 2.1µVRMS, and a power consumption <6 µW/electrode-pixel. Preliminary recordings in awake behaving mice demonstrated the capability of multi-shanks SiNAPS probes to simultaneously record neural activity (both LFPs and spikes) from a brain area >6 mm2, spanning cortical, hippocampal and thalamic regions. High-density 2D array enables combining large population unit recording across distributed networks with precise intra- and interlaminar/nuclear mapping of the oscillatory dynamics. These results pave the way to a new generation of high-density and extremely compact multi-shanks CMOS-probes with tunable layouts for electrophysiological mapping of brain activity at the single-neurons resolution.


2016 ◽  
Vol 214 (2) ◽  
pp. 1532347 ◽  
Author(s):  
Farnoosh Vahidpour ◽  
Lowry Curley ◽  
István Biró ◽  
Matthew McDonald ◽  
Dieter Croux ◽  
...  

2018 ◽  
Vol 4 (1) ◽  
pp. 469-472 ◽  
Author(s):  
Michael Schweigmann ◽  
Klaus Peter Koch ◽  
Fabian Auler ◽  
Frank Kirchhoff

AbstractThe quality of bioelectrical signals is essential for functional evaluation of cellular circuits. The electrical activity recorded from the cortical brain surface represents the average of many individual synaptic processes. By downsizing micro-electrode arrays, the spatial resolution of electrocortico-grams (ECoGs) can be increased. But, upon increasing electrode impedance, recorded noise from the electrode-tissue interface and the surroundings will become more prominent. Frequently, signal interpretation is improved by post-processing using filtering or pattern recognition. For a variety of applications, wavelet denoising has become an accepted tool. Here, we present how wavelet denoising affects the signal-to-noise ratio of ECoGs. The recording qualities from awake and anesthetized mice was artificially reduced by adding two noise models prior to filtering. Raw and filtered signals were compared by calculating the linear correlation coefficient.


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