Spectral examination of the "loading" effect while removing the photoresist coatings from the substrate surfaces in the microwave plasma discharge

Author(s):  
S.V. Bordusov
Author(s):  
S. A. Eremin ◽  
I. A. Leontiev ◽  
Yu. M. Yashnov ◽  
V. N. Anikin

In this paper was investigated effect of pumping a mixture of methane and hydrogen in a microwave discharge through layers of diamond powder on structure formation sediment during chemical infiltration from the gas phase. The infiltration process was implemented on the conditions of gas pumping through the layers of diamond powder, in the presence of a plasma discharge over the samples. It is established that in contempt of the size of the diamond powder, the growth of diamond from the gas phase occurs on the surface of the first layer, the growth of diamond from the gas phase stops when the second layer starts, and different allotropic modifications of carbon start to grow, in particular nanocrystalline graphite, carbon nanotubes, and graphite. Such a rapid transition between diamond growth and the growth of various allotropic carbon modifications is related with the screening of the plasma discharge by the first layer of diamond powder. Thus, the absence of direct contact of the microwave plasma discharge with the formed molecular hydrogen during its recombination leads to the fact that the concentration of atomic hydrogen is low to maintain the growth of diamond from the gas phase inside the layer of diamond powder.


2016 ◽  
Vol 685 ◽  
pp. 657-661 ◽  
Author(s):  
Ludmila N. Shiyan ◽  
Alexey G. Zherlitsyn ◽  
Seda O. Magomadova ◽  
Cyril S. Lazar

This paper reports about results describing the mechanism of oxidation-reduction reactions occurring in the microwave plasma interaction with organic compounds solutions. Air and argon were used as the plasma gases in the experiments on disrupture of aqueous liquid organic compounds. Application of inversible redox indicator of methylene blue (MB) showed that disrupture of organic substances in microwave plasma was based on redox reactions. It was found that MB highest efficiency in the solution took place when air plasma-supporting gas was used.


2015 ◽  
Vol 54 ◽  
pp. 9-14 ◽  
Author(s):  
Hideaki Yamada ◽  
Akiyoshi Chayahara ◽  
Yoshiaki Mokuno ◽  
Shinichi Shikata

2016 ◽  
Vol 44 (1) ◽  
pp. 39-48 ◽  
Author(s):  
Rajavasanth Rajasegar ◽  
Constandinos M. Mitsingas ◽  
Eric K. Mayhew ◽  
Stephen Hammack ◽  
Hyungrok Do ◽  
...  

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