Numerical microwave plasma discharge study for the growth of large single-crystal diamond

Diamond and Related Materials ◽

10.1016/j.diamond.2014.11.005 ◽

2015 ◽

Vol 54 ◽

pp. 9-14 ◽

Author(s):

Hideaki Yamada ◽

Akiyoshi Chayahara ◽

Yoshiaki Mokuno ◽

Shinichi Shikata

Keyword(s):

Single Crystal ◽

Microwave Plasma ◽

Plasma Discharge ◽

Large Single Crystal ◽

Single Crystal Diamond

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Development of the microwave plasma CVD technique for rapid growth of large single-crystal diamond

The 33rd IEEE International Conference on Plasma Science, 2006. ICOPS 2006. IEEE Conference Record - Abstracts. ◽

10.1109/plasma.2006.1707312 ◽

2006 ◽

Author(s):

Chih-shiue Yan ◽

Shih-shian Ho ◽

J. Lai ◽

S. Krasnicki ◽

Ho-kwang Mao ◽

...

Keyword(s):

Single Crystal ◽

Rapid Growth ◽

Microwave Plasma ◽

Large Single Crystal ◽

Single Crystal Diamond ◽

Microwave Plasma Cvd

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Synthesis of large single crystal diamond plates by high rate homoepitaxial growth using microwave plasma CVD and lift-off process

Diamond and Related Materials ◽

10.1016/j.diamond.2007.12.058 ◽

2008 ◽

Vol 17 (4-5) ◽

pp. 415-418 ◽

Author(s):

Y. Mokuno ◽

A. Chayahara ◽

H. Yamada

Keyword(s):

Single Crystal ◽

Microwave Plasma ◽

High Rate ◽

Large Single Crystal ◽

Homoepitaxial Growth ◽

Single Crystal Diamond ◽

Microwave Plasma Cvd ◽

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Model of Reactive Microwave Plasma Discharge for Growth of Single-Crystal Diamond

Japanese Journal of Applied Physics ◽

10.1143/jjap.50.01ab02 ◽

2011 ◽

Vol 50 ◽

pp. 01AB02 ◽

Author(s):

Hideaki Yamada ◽

Akiyoshi Chayahara ◽

Yoshiaki Mokuno ◽

Shin-ichi Shikata

Keyword(s):

Single Crystal ◽

Microwave Plasma ◽

Plasma Discharge ◽

Single Crystal Diamond

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Simulation of microwave plasma discharge in 915 MHZ CVD reactor for single crystal diamond deposition

2011 Abstracts IEEE International Conference on Plasma Science ◽

10.1109/plasma.2011.5993165 ◽

2011 ◽

Author(s):

K. W. Hemawan ◽

C. S. Yan ◽

Q. Liang ◽

J. Lai ◽

S. Krasnicki ◽

...

Keyword(s):

Single Crystal ◽

Microwave Plasma ◽

Plasma Discharge ◽

Diamond Deposition ◽

Single Crystal Diamond

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Model of Reactive Microwave Plasma Discharge for Growth of Single-Crystal Diamond

Japanese Journal of Applied Physics ◽

10.7567/jjap.50.01ab02 ◽

2011 ◽

Vol 50 (1S1) ◽

pp. 01AB02 ◽

Author(s):

Hideaki Yamada ◽

Akiyoshi Chayahara ◽

Yoshiaki Mokuno ◽

Shin-ichi Shikata

Keyword(s):

Single Crystal ◽

Microwave Plasma ◽

Plasma Discharge ◽

Single Crystal Diamond

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Raman spectra of a cross section of a large single crystal diamond synthesized by using microwave plasma CVD

Diamond and Related Materials ◽

10.1016/j.diamond.2009.10.002 ◽

2010 ◽

Vol 19 (2-3) ◽

pp. 171-173 ◽

Author(s):

Z.B. Feng ◽

A. Chayahara ◽

Y. Mokuno ◽

H. Yamada ◽

S. Shikata

Keyword(s):

Single Crystal ◽

Raman Spectra ◽

Cross Section ◽

Microwave Plasma ◽

Large Single Crystal ◽

Single Crystal Diamond ◽

Microwave Plasma Cvd

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Large Single Crystal Diamond Plates Produced by Microwave Plasma CVD

Materials Science Forum ◽

10.4028/www.scientific.net/msf.615-617.991 ◽

2009 ◽

Vol 615-617 ◽

pp. 991-994 ◽

Author(s):

Yoshiaki Mokuno ◽

Akiyoshi Chayahara ◽

Hideaki Yamada ◽

Nobuteru Tsubouchi

Keyword(s):

Single Crystal ◽

Microwave Plasma ◽

Cvd Diamond ◽

Large Single Crystal ◽

Single Crystal Diamond ◽

Microwave Plasma Cvd ◽

Recent Developments ◽

Lift Off ◽

Recent developments in producing large single crystal CVD diamond plates are reviewed. The developments consist of synthesis of large single crystal diamond and production of single crystal diamond plates from the bulk diamond by the lift-off process. Combining these developments, half-inch single crystal CVD diamond plates have been successfully produced.

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The regulating effect of cooling water temperature on the axial growth rate of large single crystal diamond under HPHT conditions

Journal of Crystal Growth ◽

10.1016/j.jcrysgro.2019.06.011 ◽

2019 ◽

Vol 522 ◽

pp. 5-10 ◽

Author(s):

Yadong Li ◽

Fangbiao Wang ◽

Chunxiao Wang ◽

Liangchao Chen ◽

Longsuo Guo ◽

...

Keyword(s):

Growth Rate ◽

Single Crystal ◽

Water Temperature ◽

Cooling Water ◽

Large Single Crystal ◽

Cooling Water Temperature ◽

Single Crystal Diamond ◽

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Microwave plasma assisted synthesis of single crystal diamond at high pressures and high power densities

2011 Abstracts IEEE International Conference on Plasma Science ◽

10.1109/plasma.2011.5992941 ◽

2011 ◽

Author(s):

J. Lu ◽

Y. Gu ◽

D. K. Reinhard ◽

T. A. Grotjohn ◽

J. Asmussen

Keyword(s):

Single Crystal ◽

High Pressures ◽

Microwave Plasma ◽

Single Crystal Diamond ◽

Power Densities

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Lateral outward growth of single-crystal diamond by two different structures of microwave plasma reactors

CrystEngComm ◽

10.1039/d1ce01373d ◽

2022 ◽

Author(s):

Wei Cao ◽

Zhibin Ma ◽

Hongyang Zhao ◽

Deng Gao ◽

Qiuming Fu

Keyword(s):

Chemical Vapor Deposition ◽

Single Crystal ◽

Vapor Deposition ◽

Microwave Plasma ◽

Chemical Vapor ◽

Lateral Growth ◽

Plasma Reactors ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition ◽

Single Crystal Diamond

On a semi-open holder, the homoepitaxial lateral growth of single-crystal diamond (SCD) was carried out via microwave plasma chemical vapor deposition (MPCVD). By tuning and optimizing two different structures of...

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