Advantage Timely Energized Bubble Oscillation Megasonic Nano-Spray Method to Eliminate Surface Particle Defect in Lightly Doped Drain 28NM

2020 ◽  
Author(s):  
Hong Li ◽  
Fang Li ◽  
Wenyan Liu ◽  
Jun Huang ◽  
Yu Zhang ◽  
...  
Keyword(s):  
Bubble Oscillation ◽  
Spray Method ◽  
Surface Particle ◽  
Lightly Doped Drain

Pengaruh Pendopingan Karbon Terhadap Struktur Kristal dan Morfologi TIO2

2019 ◽  
Vol 2 (2) ◽  
Author(s):  
Frastica Deswardani ◽  
Helga Dwi Fahyuan ◽  
Rimawanto Gultom ◽  
Eif Sparzinanda
Keyword(s):  
Thin Film ◽  
Crystal Structure ◽  
Grain Size ◽  
Tio2 Thin Film ◽  
Crystal Size ◽  
Diffraction Peak ◽  
Carbon Doping ◽  
Tio2 Anatase ◽  
Spray Method ◽  
Carbon Analysis

Telah dilakukan penelitian mengenai pengaruh konsentrasi doping karbon pada lapisan tipis TiO2 yang ditumbuhkan dengan metode spray terhadap struktur kristal dan morfologi TiO2. Hasil karakterisasi SEM menunjukkan bahwa penambahan doping karbon dapat meningkatkan ukuran butir. Lapisan TiO2 doping karbon 8% diperoleh ukuran butir terbesar adalah 1.35 μm, sedangkan ukuran tekecilnya adalah 0.45 μm. Sementara itu, untuk lapisan tipis TiO2 didoping karbon 15% memiliki ukuran butir terbesar yaitu 1.76 μm dan terkecil 0.9 μm. Hasil XRD menunjukkan seluruh puncak difraksi lapisan tipis TiO2 dengan doping karbon 8% dan 15% merupakan TiO2 anatase. Ukuran kristal lapisan TiO2 didoping karbon 8% diperoleh sebesar 638,08 Å dan untuk pendopingan 15% karbon ukuran kristal lapisan tipis TiO2 adalah 638,09 Å, hal ini menunjukkan ukuran kristal kedua sampel tidak mengalami perubahan yang signifikan.   TiO2 thin film with carbon doping has been successfully grown by spray method. The research on the effect of carbon doping on crystal structure and morfology of TiO2 has been prepared by varying carbon concentration (8% and 15% carbon). Analysis of SEM showed that the addition of carbon may increase the grain size. Thin film of TiO2 doped carbon 8% has the largest grain size 1.35 μm, while the smallest grain size is 0.45 μm. Meanwhile, for thin film TiO2 doped carbon 15% has the largest grain size 1.76 μm and smallest 0.9 μm. The XRD results showed the entire diffraction peak of thin film TiO2 doped carbon 8% and 15% were TiO2 anatase. The crystal size of thin film TiO2 doped carbon 8% was obtained at 638.08 Å and for thin film TiO2 doped carbon 15% the crystalline size of TiO2 thin film was 638.09 Å, this shows that the crystal size of both samples did not change significantly.    

Peripheral Arterial Thrombolysis by Modified Pulse-Spray Method

1994 ◽  
Vol 30 (5) ◽  
pp. 835
Author(s):  
Ki Nam Lee ◽  
Sun Seob Choi ◽  
Yung Il Lee ◽  
Byeong Ho Park ◽  
Jae Ik Kim ◽  
...  
Keyword(s):  
Spray Method ◽  
Peripheral Arterial ◽  
Arterial Thrombolysis

The Modified Pulse-Spray Method Using Urokinase in Subacute and Chronic Thrombotic Arterial Occlusion

1996 ◽  
Vol 35 (6) ◽  
pp. 887
Author(s):  
Youn Kil Kim ◽  
Seong Tae Hahn ◽  
Jee Hee Baek ◽  
Choon Yul Kim ◽  
Kyung Sub Shinn
Keyword(s):  
Arterial Occlusion ◽  
Spray Method

Nanoprobe Characterization of Soft SRAM bit Fails in Advanced Technologies

2019 ◽  
Author(s):  
Satish Kodali ◽  
Chen Zhe ◽  
Chong Khiam Oh
Keyword(s):  
Yield Loss ◽  
Performance Metrics ◽  
Root Cause ◽  
Advanced Technologies ◽  
Capacitance Voltage ◽  
Defect Localization ◽  
Cv Measurements ◽  
Lightly Doped Drain ◽  
Dc Characterization

Abstract Nanoprobing is one of the key characterization techniques for soft defect localization in SRAM. DC transistor performance metrics could be used to identify the root cause of the fail mode. One such case report where nanoprobing was applied to a wafer impacted by significant SRAM yield loss is presented in this paper where standard FIB cross-section on hard fail sites and top down delayered inspection did not reveal any obvious defects. The authors performed nanoprobing DC characterization measurements followed by capacitance-voltage (CV) measurements. Two probe CV measurement was then performed between the gate and drain of the device with source and bulk floating. The authors identified valuable process marginality at the gate to lightly doped drain overlap region. Physical characterization on an inline split wafer identified residual deposits on the BL contacts potentially blocking the implant. Enhanced cleans for resist removal was implemented as a fix for the fail mode.

Experimental and numerical investigation of bubble oscillation and jet impact near a solid boundary

2021 ◽  
Vol 138 ◽  
pp. 106606
Author(s):  
Hongfeng Zhang ◽  
Zhubi Lu ◽  
Penghua Zhang ◽  
Jiayang Gu ◽  
Chunhui Luo ◽  
...  
Keyword(s):  
Numerical Investigation ◽  
Solid Boundary ◽  
Bubble Oscillation ◽  
Jet Impact

Near infrared Dual wavelength micro surface particle laser

2021 ◽  
pp. 150094
Author(s):  
Jin Wang Writing - Original Draf ◽  
Xue-Qiong Su ◽  
Dong-Wen Gao ◽  
Rui-Xiang Chen ◽  
Yun-Yun Mu ◽  
...  
Keyword(s):  
Near Infrared ◽  
Dual Wavelength ◽  
Surface Particle

scholarly journals Computational Modeling of Vortex Generators for Turbomachinery

2002 ◽  
Author(s):  
R. V. Chima
Keyword(s):  
Computational Models ◽  
Body Force ◽  
Secondary Flows ◽  
The Body ◽  
Vortex Generators ◽  
Force Model ◽  
Suction Surface ◽  
Near Surface ◽  
Compressor Rotor ◽  
Surface Particle

In this work computational models were developed and used to investigate applications of vortex generators (VGs) to turbomachinery. The work was aimed at increasing the efficiency of compressor components designed for the NASA Ultra Efficient Engine Technology (UEET) program. Initial calculations were used to investigate the physical behavior of VGs. A parametric study of the effects of VG height was done using 3-D calculations of isolated VGs. A body force model was developed to simulate the effects of VGs without requiring complicated grids. The model was calibrated using 2-D calculations of the VG vanes and was validated using the 3-D results. Then three applications of VGs to a compressor rotor and stator were investigated: 1. The results of the 3-D calculations were used to simulate the use of small casing VGs used to generate rotor preswirl or counterswirl. Computed performance maps were used to evaluate the effects of VGs. 2. The body force model was used to simulate large partspan splitters on the casing ahead of the stator. Computed loss buckets showed the effects of the VGs. 3. The body force model was also used to investigate the use of tiny VGs on the stator suction surface for controlling secondary flows. Near-surface particle traces and exit loss profiles were used to evaluate the effects of the VGs.

Experimental Investigation on Surface Particle Interactions During Pool Boiling of Nanofluids

2011 ◽  
Author(s):  
Harish Ganapathy ◽  
V. Emlin ◽  
Anant Narendra Parikh ◽  
V. Sajith
Keyword(s):  
Surface Roughness ◽  
Interaction Parameter ◽  
Surface Characterization ◽  
Pool Boiling ◽  
Particle Interaction ◽  
Nucleate Boiling ◽  
Optical Measurements ◽  
Sorption Layer ◽  
Surface Particle ◽  
Enhanced Boiling

The pool boiling characteristics of nanofluids is affected by the interaction between the nanoparticles and the heater surface which forms a sorption layer and this layer increases the surface wettability and thereby enhances the CHF. While deteriorated nucleate boiling has been attributed to the decreased activation of cavities due to the increased wettability, it fails to explain the enhanced performance observed by several researchers, which can be explained only by an increase in surface roughness and hence a direct increase in the number of cavities, thereby compensating for the increase in wettability. Attempts to characterize the roughness of heater surfaces have been restricted to magnified visualizations and intrusive probing. No non-intrusive tests have been reported on flat heaters, which are ideal to conduct surface analyses. The present work is aimed at conducting a non-intrusive experimental study to analyse the surface roughness modification due to the sorption layer on flat plate heaters. Experiments have been carried out using electro-stabilized aluminium oxide water based nanofluids of different concentrations with heaters having varying values of surface roughness. The burn-out heat flux was measured and the effect of sedimentation time was studied. The surface-particle interaction parameter (Ra/dp) was varied to capture the phenomena of plugging as well as splitting of nucleation sites. An experiment having a high value of the interaction parameter shows enhanced boiling performance and that with a value close to 1 shows deteriorated performance. Further it was seen that this behaviour is dependent on the particle concentration. Detailed surface characterization has been done using an optical measurements setup and atomic force microscopy. Boiling on nano-coated heaters has been investigated and presented as an effective solution to counter the disadvantageous transient boiling behavior of nanofluids.

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