Formation of smooth Au surfaces produced by multiple thin-film transfer process based on template stripping for low-temperature bonding

2020 ◽  
Author(s):  
Eiji Higurashi ◽  
Michitaka Yamamoto ◽  
Ryutaro Nishimura ◽  
Takashi Matsumae ◽  
Yuichi Kurashima ◽  
...  
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Transfer Process ◽  
Film Transfer ◽  
Template Stripping ◽  
Low Temperature Bonding

Thin film transfer process for low cost MCM-D fabrication

1995 ◽  
Vol 18 (1) ◽  
pp. 42-46 ◽  
Author(s):  
C. Narayan ◽  
S. Purushothaman ◽  
F. Doany ◽  
A. Deutsch
Keyword(s):  
Thin Film ◽  
Transfer Process ◽  
Low Cost ◽  
Film Transfer

Surface smoothing of Au plated films by template stripping towards low-temperature bonding for 3D integration

2021 ◽  
Author(s):  
Le Hac Huong Thu ◽  
Takashi Matsumae ◽  
Yuichi Kurashima ◽  
Hideki Takagi ◽  
Eiji Higurashi
Keyword(s):  
Low Temperature ◽  
Surface Smoothing ◽  
3D Integration ◽  
Template Stripping ◽  
Low Temperature Bonding

Towards wall-coated microfabricated cells: Alkali vapor-cells using indium thin-film low-temperature bonding

2012 ◽  
Author(s):  
R. Straessle ◽  
Y. Petremand ◽  
D. Briand ◽  
N.F. de Rooij ◽  
M. Pellaton ◽  
...  
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Vapor Cells ◽  
Low Temperature Bonding

Low-Temperature Bonding of Bi0.5Sb1.5Te3 Thermoelectric Material with Cu Electrodes Using a Thin-Film In Interlayer

2016 ◽  
Vol 47 (9) ◽  
pp. 4767-4776 ◽  
Author(s):  
Yan-Cheng Lin ◽  
Chung-Lin Yang ◽  
Jing-Yi Huang ◽  
Chao-Chi Jain ◽  
Jen-Dong Hwang ◽  
...  
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Thermoelectric Material ◽  
Low Temperature Bonding
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