Geometric variation: A novel approach to examine the surface roughness and the line roughness effects in trigate FinFETs

This work is on the preparation of microelectrodes for μ-EDM operation using μ-WEDG process. Electrodes of Ø500 μm are fabricated with various discharge energy machining conditions. Effects of gap voltage, capacitance & feed rate on the surface finish of the electrodes and overcut of the thus produced micro holes are investigated. The profile of microelectrodes is measured using surface roughness tester with 2μm stylus interfaced with SURFPAK software. The study demonstrated that for brass electrodes an arithmetic average roughness value as low as 1.7μm and an overcut of 3 µm could be achieved. The significant machining parameters are found using ANOVA. Surface of the produced microelectrodes are examined using Scanning Electron Microscope. μ-WEDG process parameters could be adjusted to achieve good surface integrity on microelectrodes. Experimental results showed that the surface roughness of microelectrodes depended primarily on feed rate of the electrode. The observations showed the clear and quantitative correlation existing between the micrometer level surface quality and process parameters. The resulting microelectrodes are found to be of exceptionally high quality and could be used for μ- EDM operation on different types of work materials.

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Investigation of surface roughness effects on fluid flow in passive micromixer

Microsystem Technologies ◽

10.1007/s00542-013-1957-y ◽

2013 ◽

Vol 20 (12) ◽

pp. 2261-2269 ◽

Cited By ~ 6

Author(s):

Gaurav Pendharkar ◽

Raghavendra Deshmukh ◽

Rajendra Patrikar

Keyword(s):

Surface Roughness ◽

Fluid Flow ◽

Roughness Effects ◽

Passive Micromixer

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Surface roughness effects on equilibrium temperature.

Journal of Spacecraft and Rockets ◽

10.2514/3.29738 ◽

1969 ◽

Vol 6 (8) ◽

pp. 955-957 ◽

Cited By ~ 5

Author(s):

R. G. HERING ◽

T. F. SMITH

Keyword(s):

Surface Roughness ◽

Equilibrium Temperature ◽

Roughness Effects

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Surface roughness effects in turbulent boundary layers

Experiments in Fluids ◽

10.1007/s003480050370 ◽

1999 ◽

Vol 27 (5) ◽

pp. 450-460 ◽

Cited By ~ 280

Author(s):

P.-Å. Krogstadt ◽

R.A. Antonia

Keyword(s):

Surface Roughness ◽

Boundary Layers ◽

Turbulent Boundary Layers ◽

Roughness Effects

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An Evaluation of the Average Flow Model [1] for Surface Roughness Effects in Lubrication

Journal of Lubrication Technology ◽

10.1115/1.3251544 ◽

1980 ◽

Vol 102 (3) ◽

pp. 360-366 ◽

Cited By ~ 23

Author(s):

J. L. Teale ◽

A. O. Lebeck

Keyword(s):

Surface Roughness ◽

Flow Model ◽

Two Dimensional ◽

Roughness Effects ◽

Important Conclusion ◽

Average Flow ◽

One Dimensional ◽

Dimensional Flow ◽

Two Dimensional Flow ◽

Average Flow Model

The average flow model presented by Patir and Cheng [1] is evaluated. First, it is shown that the choice of grid used in the average flow model influences the results. The results presented are different from those given by Patir and Cheng. Second, it is shown that the introduction of two-dimensional flow greatly reduces the effect of roughness on flow. Results based on one-dimensional flow cannot be relied upon for two-dimensional problems. Finally, some average flow factors are given for truncated rough surfaces. These can be applied to partially worn surfaces. The most important conclusion reached is that an even closer examination of the average flow concept is needed before the results can be applied with confidence to lubrication problems.

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