Abstract
In this article, an overview of the mechanical reliability of silicon microstructures for micro-electro-mechanical systems (MEMS) is given to clarify what we now know and what we still have to know about silicon as a high-performance mechanical material on the microscale. Focusing on the strength and fatigue properties of silicon, attempts to understand the reliability of silicon and to predict the device reliability of silicon-based microstructures are introduced. The effective parameters on the strength and the mechanism of fatigue failure are discussed with examples of measurement data to show the design guidelines for highly reliable silicon microstructures and devices.
From natural material to high-performance silicon based anode: Towards cost-efficient silicon based electrodes in high-performance Li-ion batteries