Thin film material properties analysis with quartz crystal resonators

AbstractNarrow micromachined bilayer cantilevers, which are broadly used to determine different thin film material properties, have rarely been used to characterize the Poisson's ratio. It is difficult to be determined from the tip deflection, and thus the Poisson's ratio, of the narrow bilayer cantilever. In this paper, the tip deflections of ultra-wide micromachined bilayer cantilevers carry the needed information for finding the Poisson's ratio of thin-film materials. The measurement process and its corresponding model, based on the plate theory, is introduced and tested. The Poisson's ratio of the thin film is determined by comparing the tip deflections of the bilayer cantilever before and after the deposition of the upper layer. Because the fabrication processes are widely used in surface micromachining, the method can be easily implemented.

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Application-specific oxide-based and metal-dielectric thin-film materials prepared by RF sputtering

10.32545/encyclopedia201910.0003.v2 ◽

2019 ◽

Author(s):

Mohammad Nur E Alam ◽

Mikhail Vasiliev

Keyword(s):

Thin Film ◽

Material Properties ◽

High Performance ◽

Rf Sputtering ◽

Rf Magnetron Sputtering ◽

Film Material ◽

Dielectric Thin Film ◽

Thin Film Material ◽

Material Systems ◽

Application Specific

We report on the development of several different thin-film material systems prepared by RF magnetron sputtering at Edith Cowan University nanofabrication labs. While focusing on the RF sputtering process optimizations for new or the previously underexplored material compositions and multilayer structures, we disclose several unforeseen material properties and behaviours. We communicate research results related to the design, prototyping, and practical fabrication of high-performance magneto-optic (MO) materials, oxide based sensor components, and transparent heat regulation coatings for advanced construction and solar windows.

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Pulsed Laser Deposition of Thin Film Material for Nonlinear Waveguides.

10.21236/ada290789 ◽

1994 ◽

Author(s):

Felix E. Fernandez

Keyword(s):

Thin Film ◽

Pulsed Laser Deposition ◽

Pulsed Laser ◽

Laser Deposition ◽

Film Material ◽

Nonlinear Waveguides ◽

Thin Film Material

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Abnormal infrared effects of nanometer scale thin film material of PtPd alloy in CO adsorption

Chinese Science Bulletin ◽

10.1007/bf03187026 ◽

2001 ◽

Vol 46 (17) ◽

pp. 1439-1442 ◽

Cited By ~ 8

Author(s):

Zhi Chen ◽

Shigang Sun ◽

Nan Ding ◽

Zhiyou Zhou

Keyword(s):

Thin Film ◽

Co Adsorption ◽

Nanometer Scale ◽

Film Material ◽

Thin Film Material

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Preparation and Characterization of SnO2/WO3/MWCNT Nanocomposite Thin Film for NO2 Gas Sensor

Advanced Materials Research ◽

10.4028/www.scientific.net/amr.129-131.99 ◽

2010 ◽

Vol 129-131 ◽

pp. 99-103

Author(s):

Wei Lin ◽

Shi Zhen Huang ◽

Wen Zhe Chen

Keyword(s):

Thin Film ◽

Gas Sensor ◽

Photoelectron Spectroscopy ◽

Mixed Oxides ◽

Surface Composition ◽

Chemical Elements ◽

Film Material ◽

Nanocomposite Thin Film ◽

Oxide Compound ◽

Thin Film Material

A novel nanocomposite thin film material of SnO2/WO3 metal oxide compound doped by multi-walled carbon nanotubes (MWCNT) and its corresponding gas sensor were prepared by radio frequency (RF) reactive magnetron sputtering. The surface composition and chemical elements of the thin film material were respectively analyzed and validated by X-ray diffraction (XRD) and photoelectron spectroscopy (XPS). The influencing factors of gas sensing properties were studied and the test results of gas sensor were analyzed. The results indicated that the detection using the composite material gas sensors for low concentration NO2 toxic gas could be greatly improved by MWCNTs which were doped on the mixed oxides matrix. A possible mechanism explaining the behaviour of the thin film gas sensor was introduced.

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