Application-specific oxide-based and metal-dielectric thin-film materials prepared by RF sputtering
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We report on the development of several different thin-film material systems prepared by RF magnetron sputtering at Edith Cowan University nanofabrication labs. While focusing on the RF sputtering process optimizations for new or the previously underexplored material compositions and multilayer structures, we disclose several unforeseen material properties and behaviours. We communicate research results related to the design, prototyping, and practical fabrication of high-performance magneto-optic (MO) materials, oxide based sensor components, and transparent heat regulation coatings for advanced construction and solar windows.
2019 ◽
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2014 ◽
Vol 38
(8)
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pp. 863-867
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2010 ◽
Vol 129-131
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pp. 99-103
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