Characterization of a Xenon plasma electron flood gun on a GSD-200E/sup 2/ high current implanter using Q/sub BD/, FLASH, SPIDER, and CHARM/sup TM/-2 wafers

Author(s):  
P. Kopalidis ◽  
Y. Erokhin ◽  
R. Santiesteban ◽  
V. Soncini
Keyword(s):  
2019 ◽  
Vol 52 (18) ◽  
pp. 185203 ◽  
Author(s):  
R Sousa Martins ◽  
C Zaepffel ◽  
L Chemartin ◽  
Ph Lalande ◽  
F Lago
Keyword(s):  

2002 ◽  
Vol 50 (4) ◽  
pp. 1084-1094 ◽  
Author(s):  
M.S. Shirokov ◽  
S.V. Cherepko ◽  
Xiaohang Du ◽  
J.C.M. Kwang ◽  
D.A. Teeter

2013 ◽  
Vol 774-776 ◽  
pp. 795-798
Author(s):  
Ting Jin Zhou ◽  
Min Lu ◽  
Ri Yao Chen

Carboxymethyl cellulose (CMC)-polyvinyl alcohol (PVA) and chitosan (CS)-polyvinyl alcohol were cross-linked by Fe3+and glutaraldehyde respectively to prepare cation exchange layer and anion exchange layer, and polyvinyl alcohol-sodium alginate (SA)-metal octocarboxyphthalocyanine (MePc (COOH)8, a kind of water splitting catalyst, here, Me stands for Fe3+or Co2+) nanofibers were prepared by electrospinning technique and introduced into the interlayer to obtain the CMC-PVA/PVA-SA-MePc (COOH)8/CS-PVA bipolar membrane (BPM). The experimental results showed that compared with the BPM without the PVA-SA-MePc (COOH)8interlayer, the water splitting efficiency at the interlayer of the CMC-PVA/PVA-SA-MePc (COOH)8/ CS-PVA BPM was obviously increased, and its membrane impedance decreased. When the concentration of FePc (COOH)8in the PVA-SA-FePc (COOH)8nanofibers was 3.0%, the trans-membrane voltage drop (IRdrop) of the CMC-PVA/PVA-SA-FePc (COOH)8/CS-PVA BPM was as low as 0.6V at a high current density of 90 mA/cm2.


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