Plasma treatment after interconnect metal etch for recovery of plasma charge-induced damages

2002 ◽  
Author(s):  
Shin Seung Park ◽  
Chang Ju Choi ◽  
Jin Woong Kim ◽  
Jeong Mo Hwang
Keyword(s):  
Plasma Treatment

Activity of Ag Nanoparticle Supported Zeolite after Plasma Treatment

2013 ◽  
Vol 133 (3) ◽  
pp. 144-145 ◽  
Author(s):  
Yoshiyuki Teramoto ◽  
Hyun-Ha Kim ◽  
Atsushi Ogata ◽  
Nobuaki Negishi
Keyword(s):  
Plasma Treatment ◽  
Ag Nanoparticle

Investigation of Plasma Treatment Conditions for Wafer-Scale Room-Temperature Bonding Using Ultrathin Au Films in Ambient Air

2019 ◽  
Vol 139 (7) ◽  
pp. 217-218
Author(s):  
Michitaka Yamamoto ◽  
Takashi Matsumae ◽  
Yuichi Kurashima ◽  
Hideki Takagi ◽  
Tadatomo Suga ◽  
...  
Keyword(s):  
Plasma Treatment ◽  
Room Temperature ◽  
Ambient Air ◽  
Wafer Scale ◽  
Treatment Conditions

THE MODIFICATION OF PAPER INDUCED BY RADIO FREQUENCY AND MICROWAVE PLASMA TREATMENT

2007 ◽  
Vol 11 (4) ◽  
pp. 593-600
Author(s):  
V. V. Azharonok ◽  
I. I. Filatova ◽  
A. P. Dostanko ◽  
S. V. Bordusov ◽  
Yu. S. Shynkevich
Keyword(s):  
Radio Frequency ◽  
Plasma Treatment ◽  
Microwave Plasma

Plasma Treatment Effect on the Paramagnetic Species of Barley Seed Radical's Intensity: An EPR study

2020 ◽  
Author(s):  
Pankaj Attri ◽  
Anan Teruki ◽  
Ryo Arita ◽  
Takamasa Okumura ◽  
Hayate Tanaka ◽  
...  
Keyword(s):  
Plasma Treatment ◽  
Treatment Effect ◽  
Barley Seed ◽  
Paramagnetic Species

Effect of Glow-discharge Hydrogen Plasma Treatment on Zinc Oxide Layers Prepared through Pulsed Electrochemical Deposition and via SILAR Method

2019 ◽  
Vol 11 (5) ◽  
pp. 05002-1-05002-7
Author(s):  
N. P. Klochko ◽  
◽  
K. S. Klepikova ◽  
S. I. Petrushenko ◽  
A. V. Nikitin ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Glow Discharge ◽  
Plasma Treatment ◽  
Electrochemical Deposition ◽  
Hydrogen Plasma ◽  
Silar Method ◽  
Oxide Layers
Sign in / Sign up

Export Citation Format

Share Document