Investigation of Plasma Treatment Conditions for Wafer-Scale Room-Temperature Bonding Using Ultrathin Au Films in Ambient Air

This study is focused on the development of water-based ITO nanoparticle dispersions and ink-jet fabrication methodology of an indium tin oxide (ITO) sensor for room temperature operations. Dimensionless correlations of material-tool-process variables were used to map the printing process and several interpretational frameworks were re-examined. A reduction of the problem to the Newtonian fluid approach was applied for the sake of simplicity. The ink properties as well as the properties of the deposited layers were tested for various nanoparticles loading. High-quality films were prepared and annealed at different temperatures. The best performing material composition, process parameters and post-print treatment conditions were used for preparing the testing sensor devices. Printed specimens were exposed to toluene vapours at room temperature. Good sensitivity, fast responses and recoveries were observed in ambient air although the n-type response mechanism to toluene is influenced by moisture in air and baseline drift was observed. Sensing response inversion was observed in an oxygen and moisture-free N2 atmosphere which is explained by the charge-transfer mechanism between the adsorbent and adsorbate molecules. The sensitivity of the device was slightly better and the response was stable showing no drifts in the protective atmosphere.

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Comparison of Argon and Oxygen Plasma Treatments for Ambient Room-Temperature Wafer-Scale Au–Au Bonding Using Ultrathin Au Films

Micromachines ◽

10.3390/mi10020119 ◽

2019 ◽

Vol 10 (2) ◽

pp. 119 ◽

Cited By ~ 12

Author(s):

Michitaka Yamamoto ◽

Takashi Matsumae ◽

Yuichi Kurashima ◽

Hideki Takagi ◽

Tadatomo Suga ◽

...

Keyword(s):

Surface Energy ◽

Plasma Treatment ◽

Bonding Strength ◽

Room Temperature ◽

Activation Mechanism ◽

Spectroscopy Analysis ◽

Wafer Scale ◽

O2 Plasma Treatment ◽

Ar Plasma ◽

O2 Plasma

Au–Au surface activated bonding is promising for room-temperature bonding. The use of Ar plasma vs. O2 plasma for pretreatment was investigated for room-temperature wafer-scale Au–Au bonding using ultrathin Au films (<50 nm) in ambient air. The main difference between Ar plasma and O2 plasma is their surface activation mechanism: physical etching and chemical reaction, respectively. Destructive razor blade testing revealed that the bonding strength of samples obtained using Ar plasma treatment was higher than the strength of bulk Si (surface energy of bulk Si: 2.5 J/m2), while that of samples obtained using O2 plasma treatment was low (surface energy: 0.1–0.2 J/m2). X-ray photoelectron spectroscopy analysis revealed that a gold oxide (Au2O3) layer readily formed with O2 plasma treatment, and this layer impeded Au–Au bonding. Thermal desorption spectroscopy analysis revealed that Au2O3 thermally desorbed around 110 °C. Annealing of O2 plasma-treated samples up to 150 °C before bonding increased the bonding strength from 0.1 to 2.5 J/m2 due to Au2O3 decomposition.

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Visible-light-initiated Catalyst-free Oxidative Cleavage of Triaryl-Substituted Alkenes C=C Bonds under Ambient Conditions

Green Chemistry ◽

10.1039/d1gc00716e ◽

2021 ◽

Author(s):

Wenjing Li ◽

Shun Li ◽

Lihua Luo ◽

Yichen Ge ◽

Jiaqi Xu ◽

...

Keyword(s):

Visible Light ◽

Room Temperature ◽

Ambient Air ◽

Oxidative Cleavage ◽

Ambient Conditions ◽

Blue Led ◽

Catalyst Free

The catalyst-free oxidative cleavage of (Z)-triaryl-substituted alkenes bearing pyridyl motif with ambient air under irradiation of blue LED at room temperature has been developed. The reaction was facile and scalable,...

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Room-Temperature Solution-Processed 0D/1D Bilayer Electrodes for Translucent CsPbBr3 Perovskite Photovoltaics

Nanomaterials ◽

10.3390/nano11061489 ◽

2021 ◽

Vol 11 (6) ◽

pp. 1489

Author(s):

Bhaskar Parida ◽

Saemon Yoon ◽

Dong-Won Kang

Keyword(s):

Solar Cells ◽

Indium Tin Oxide ◽

High Performance ◽

Room Temperature ◽

Low Cost ◽

Perovskite Solar Cells ◽

Ambient Air ◽

Plasma Damage ◽

Temperature Solution ◽

Ito Nanoparticles

Materials and processing of transparent electrodes (TEs) are key factors to creating high-performance translucent perovskite solar cells. To date, sputtered indium tin oxide (ITO) has been a general option for a rear TE of translucent solar cells. However, it requires a rather high cost due to vacuum process and also typically causes plasma damage to the underlying layer. Therefore, we introduced TE based on ITO nanoparticles (ITO-NPs) by solution processing in ambient air without any heat treatment. As it reveals insufficient conductivity, Ag nanowires (Ag-NWs) are additionally coated. The ITO-NPs/Ag-NW (0D/1D) bilayer TE exhibits a better figure of merit than sputtered ITO. After constructing CsPbBr3 perovskite solar cells, the device with 0D/1D TE offers similar average visible transmission with the cells with sputtered ITO. More interestingly, the power conversion efficiency of 0D/1D TE device was 5.64%, which outperforms the cell (4.14%) made with sputtered-ITO. These impressive findings could open up a new pathway for the development of low-cost, translucent solar cells with quick processing under ambient air at room temperature.

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Characterisation of FR-4 substrate with various plasma treatment conditions

Materials Science and Technology ◽

10.1179/174328407x168874 ◽

2007 ◽

Vol 23 (7) ◽

pp. 792-798 ◽

Cited By ~ 3

Author(s):

B.-I. Noh ◽

S.-B. Jung

Keyword(s):

Plasma Treatment ◽

Treatment Conditions

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The effect of active screen plasma treatment conditions on the growth and performance of Pt nanowire catalyst layer in DMFCs

International Journal of Hydrogen Energy ◽

10.1016/j.ijhydene.2016.02.008 ◽

2016 ◽

Vol 41 (18) ◽

pp. 7622-7630 ◽

Cited By ~ 18

Author(s):

Kaijie Lin ◽

Yaxiang Lu ◽

Shangfeng Du ◽

Xiaoying Li ◽

Hanshan Dong

Keyword(s):

Plasma Treatment ◽

Catalyst Layer ◽

Treatment Conditions ◽

And Performance ◽

Active Screen

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Room temperature H2 plasma treatment for enhanced passivation of silicon/TiO2 interface

Applied Physics Letters ◽

10.1063/1.5035459 ◽

2018 ◽

Vol 113 (17) ◽

pp. 171603 ◽

Cited By ~ 4

Author(s):

Swasti Bhatia ◽

Irfan M. Khorakiwala ◽

Pradeep R. Nair ◽

Aldrin Antony

Keyword(s):

Plasma Treatment ◽

Room Temperature

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Strong intrinsic room-temperature ferromagnetism in freestanding non-van der Waals ultrathin 2D crystals

Nature Communications ◽

10.1038/s41467-021-26009-0 ◽

2021 ◽

Vol 12 (1) ◽

Author(s):

Hao Wu ◽

Wenfeng Zhang ◽

Li Yang ◽

Jun Wang ◽

Jie Li ◽

...

Keyword(s):

Room Temperature ◽

Room Temperature Ferromagnetism ◽

Van Der Waals ◽

Ambient Air ◽

Critical Importance ◽

Functional Possibility ◽

Topological Quantum ◽

Unit Cells ◽

Optical And Mechanical Properties ◽

2D Crystals

AbstractControl of ferromagnetism is of critical importance for a variety of proposed spintronic and topological quantum technologies. Inducing long-range ferromagnetic order in ultrathin 2D crystals will provide more functional possibility to combine their unique electronic, optical and mechanical properties to develop new multifunctional coupled applications. Recently discovered intrinsic 2D ferromagnetic crystals such as Cr2Ge2Te6, CrI3 and Fe3GeTe2 are intrinsically ferromagnetic only below room temperature, mostly far below room temperature (Curie temperature, ~20–207 K). Here we develop a scalable method to prepare freestanding non-van der Waals ultrathin 2D crystals down to mono- and few unit cells (UC) and report unexpected strong, intrinsic, ambient-air-robust, room-temperature ferromagnetism with TC up to ~367 K in freestanding non-van der Waals 2D CrTe crystals. Freestanding 2D CrTe crystals show comparable or better ferromagnetic properties to widely-used Fe, Co, Ni and BaFe12O19, promising as new platforms for room-temperature intrinsically-ferromagnetic 2D crystals and integrated 2D devices.

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