Mechanical Characterization of Polysilicon Through On-Chip Tensile Tests
2004 ◽
Vol 13
(2)
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pp. 200-219
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2007 ◽
Vol 546-549
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pp. 1393-1400
2019 ◽
Vol 817
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pp. 365-370
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Keyword(s):
2008 ◽
Vol 587-588
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pp. 430-434
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Keyword(s):
2017 ◽
Vol 48
(1)
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pp. 3-24
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2010 ◽
Vol 43
(11)
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pp. 2221-2227
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2012 ◽
Vol 730-732
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pp. 679-684
2021 ◽