High Voltage Output MEMS Vibration Energy Harvester in $d_{31}$ Mode With PZT Thin Film

2014 ◽  
Vol 23 (4) ◽  
pp. 855-861 ◽  
Author(s):  
Licheng Deng ◽  
Zhiyu Wen ◽  
Xingqiang Zhao ◽  
Chengwei Yuan ◽  
Guoxi Luo ◽  
...  
Keyword(s):  
Thin Film ◽  
High Voltage ◽  
Energy Harvester ◽  
Vibration Energy ◽  
Vibration Energy Harvester ◽  
Voltage Output ◽  
Pzt Thin Film

scholarly journals Theoretical and Experimental Study of Nonlinear and Electro-Magneto-Mechanical-Based Piezoelectric Vibration Energy Harvester

2019 ◽  
Vol 2019 ◽  
pp. 1-17
Author(s):  
Shilong Sun ◽  
Xiao Zhang
Keyword(s):  
Experimental Study ◽  
Energy Harvester ◽  
Time History ◽  
Vibration Energy ◽  
Voltage Response ◽  
Vibration Energy Harvester ◽  
Piezoelectric Energy ◽  
Voltage Output ◽  
Cantilevered Beam ◽  
Substrate Plate

This paper presents a folded nonlinear electro-magneto-mechanical (EMM) vibration-based piezoelectric energy harvester system, which is built on the cantilevered beam structure and consists of one host beam and two substrate plates. The performance of the linearity and nonlinearity to the proposed EMM system is evaluated and compared. Moreover, the voltage response in time history and the phase portrait are studied under an external rectifier circuit with a resistor. The results show that the nonlinearity of the reported EMM system changes the coherent resonance vibration mode from single to double under a harmonic base excitation within the frequency range of 20 Hz–50 Hz. Meanwhile, the substrate plate D contributes more averaged voltage output at a lower frequency while the substrate plate A contributes the voltage output at the relatively higher frequency for the nonlinear EMM system. The experimental study indicates that the proposed nonlinear EMM vibration-based piezoelectric energy harvester can yield a total voltage of 8.133 [email protected] Hz while the baseline structure only produces 1.724 [email protected] Hz. In addition, the bandwidth range of high-power output is enlarged by the nonlinear EMM system, which makes this device more flexible and applicable to absorb the wasted vibration energy generated by industrial machines and public facilities.

Springless Vibration Energy Harvesters

2010 ◽  
Author(s):  
Mohamed A. E. Mahmoud ◽  
Eihab M. Abdel-Rahman ◽  
Raafat R. Mansour ◽  
Ehab F. El-Saadany
Keyword(s):  
Thin Film ◽  
Energy Harvester ◽  
Low Frequency ◽  
Center Frequency ◽  
Vibration Energy ◽  
Restoring Force ◽  
Vibration Energy Harvester ◽  
Energy Harvesters ◽  
Thin Film Fabrication ◽  
Film Fabrication

A novel vibration energy harvester (VEH) architecture is developed to eliminate the need for restoring force elements (springs) in the VEH. The architecture can realize VEHs with arbitrarily low center frequency. Two prototypes were fabricated and tested to demonstrate the feasibility of this architecture. The center frequency of the first prototype was found to be 2 Hz demonstrating low frequency operation. The second prototype improve the performance by five times at much smaller footprint using thin film fabrication process and precision alignment.

Improving voltage output with PZT beam array for MEMS-based vibration energy harvester: theory and experiment

2014 ◽  
Vol 21 (2) ◽  
pp. 331-339 ◽  
Author(s):  
Zhiyu Wen ◽  
Licheng Deng ◽  
Xingqiang Zhao ◽  
Zhengguo Shang ◽  
Chengwei Yuan ◽  
...  
Keyword(s):  
Energy Harvester ◽  
Vibration Energy ◽  
Vibration Energy Harvester ◽  
Beam Array ◽  
Voltage Output ◽  
Theory And Experiment

The Fabrication of Piezoelectric Vibration Energy Harvester Arrays Based on AlN Thin Film

2013 ◽  
Vol 562-565 ◽  
pp. 942-946 ◽  
Author(s):  
Zheng Guo Shang ◽  
Dong Ling Li ◽  
Zhi Yu Wen ◽  
Xing Qang Zhao
Keyword(s):  
Thin Film ◽  
Crystal Orientation ◽  
Energy Harvester ◽  
Electrode Materials ◽  
Vibration Energy ◽  
Vibration Energy Harvester ◽  
Piezoelectric Energy ◽  
Piezoelectric Thin Film ◽  
Piezoelectric Vibration Energy Harvester ◽  
Piezoelectric Vibration

This paper describes the fabrication and measurement results of piezoelectric energy harvester arrays based on aluminum nitride (AlN) as a piezoelectric material. The AlN piezoelectric thin film with crystal orientation (002) and crystal orientation (101) is deposited respectively by pulsed_DC sputtering on the different bottom electrode materials. Based on the AlN thin film, the piezoelectric vibration energy harvester arrays with 5 cantilever beams were developed. Then the load characteristics, frequency characteristics, harvester connected in series and parallel properties of harvester were investigated. In addition, we compare the properties of piezoelectric vibration energy harvester arrays with crystal orientation (101) and (002), where a record max power output of 0.23 μW and 0.38μW are obtained respectively when the value of acceleration was 1 g, while for the latter, the maximum power is 9.13 μW at the acceleration of 5.0g with the optimized resistance of 15 kΩ.

Modeling and experiment of vibro-impact vibration energy harvester based on a partial interlayer-separated piezoelectric beam

2020 ◽  
pp. 1045389X2096605
Author(s):  
Dong-Xing Cao ◽  
Wei Xia ◽  
Xiang-Ying Guo ◽  
Siu-Kai Lai
Keyword(s):  
Energy Harvesting ◽  
Energy Harvester ◽  
Maximum Output Power ◽  
Electric Energy ◽  
Beam Theory ◽  
Vibration Energy ◽  
Maximum Output ◽  
Vibration Energy Harvester ◽  
Voltage Output ◽  
Piezoelectric Beam

Piezoelectric-based energy harvesting techniques offer a promising way to transform vibration energy into electric energy. However, many vibration energy harvesters (VEH) can only work under narrow bandwidths and limited high frequencies to restrict their working performance. In this paper, a vibro-impact piezoelectric VEH is proposed, where a partial interlayer-separated piezoelectric beam is designed to improve the voltage output and frequency bandwidth of the VEH. First, the mechanism of the proposed VEH is introduced and the electromechanical model is derived based on the Euler-Bernoulli beam theory and vibro-impact dynamic model. Voltage-frequency responses are then obtained by using an approximate analytical method. In addition, the effect of partial interlayer-separated piezoelectric beams on the energy harvesting performance is investigated numerically. A parametric study is performed to investigate the influence of system parameters on the voltage output in terms of bandwidth and magnitude. Finally, the theoretical solutions are validated by experimental results, the voltage output of the proposed VEH is higher than the non-impact type. The maximum output power of the proposed VEH is about 12 times more than that of the conventional one under a 0.2 g acceleration. Due to the good agreement of the variation trend between the theoretical values and experiment results, the proposed partial interlayer-separated beam VEH can be used for a further optimization of the vibration energy harvester.

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