scholarly journals Low-Loss SOI Photonic Wires and Ring Resonators Fabricated With Deep UV Lithography

2004 ◽  
Vol 16 (5) ◽  
pp. 1328-1330 ◽  
Author(s):  
P. Dumon ◽  
W. Bogaerts ◽  
V. Wiaux ◽  
J. Wouters ◽  
S. Beckx ◽  
...  
Keyword(s):  
Ring Resonators ◽  
Low Loss ◽  
Uv Lithography ◽  
Photonic Wires ◽  
Deep Uv

scholarly journals Low Loss InP Membrane Photonic Integrated Circuits Enabled by 193-nm Deep UV Lithography

2019 ◽  
Author(s):  
Jorn van Engelen ◽  
Sander Reniers ◽  
Jeroen Bolk ◽  
Kevin Williams ◽  
Jos van der Tol ◽  
...  
Keyword(s):  
Integrated Circuits ◽  
Photonic Integrated Circuits ◽  
Low Loss ◽  
Uv Lithography ◽  
Deep Uv ◽  
193 Nm

Low-loss photonic wires and compact ring resonators in silicon-on-insulator

2004 ◽  
Author(s):  
Pieter Dumon ◽  
Wim Bogaerts ◽  
Joris Van Campenhout ◽  
Vincent Wiaux ◽  
Johan M. Wouters ◽  
...  
Keyword(s):  
Silicon On Insulator ◽  
Ring Resonators ◽  
Compact Ring ◽  
Low Loss ◽  
Photonic Wires

scholarly journals Large plasmonic color metasurfaces fabricated by super resolution deep UV lithography

2021 ◽  
Vol 3 (8) ◽  
pp. 2236-2244
Author(s):  
Matthias Keil ◽  
Alexandre Emmanuel Wetzel ◽  
Kaiyu Wu ◽  
Elena Khomtchenko ◽  
Jitka Urbankova ◽  
...  
Keyword(s):  
Super Resolution ◽  
Large Area ◽  
Uv Lithography ◽  
Deep Uv

A novel super resolution deep UV lithography method is employed to fabricate large area plasmonic metasurfaces.

scholarly journals 193-nm deep-UV lithography system using a line-narrowed ArF excimer laser

1993 ◽  
Author(s):  
Bruce W. Smith ◽  
Malcolm C. Gower ◽  
Mark Westcott ◽  
Lynn F. Fuller
Keyword(s):  
Excimer Laser ◽  
Uv Lithography ◽  
Arf Excimer Laser ◽  
Deep Uv ◽  
193 Nm ◽  
Lithography System

scholarly journals Dual-band fiber-chip grating coupler in a 300 mm silicon-on-insulator platform and 193-nm deep-UV lithography

2020 ◽  
Author(s):  
David Gonzalez-Andrade ◽  
Diego Pérez Galacho ◽  
Miguel Montesinos Ballester ◽  
Xavier LE ROUX ◽  
Eric Cassan ◽  
...  
Keyword(s):  
Silicon On Insulator ◽  
Dual Band ◽  
Grating Coupler ◽  
Uv Lithography ◽  
Deep Uv ◽  
193 Nm

Fabrication of AlGaN/GaN HEMTs with slant field plates by using deep-UV lithography

2012 ◽  
Author(s):  
Ting-En Hsieh ◽  
Lu-Che Huang ◽  
Yueh-Chin Lin ◽  
Chia-Hua Chang ◽  
Huan-Chung Wang ◽  
...  
Keyword(s):  
Uv Lithography ◽  
Gan Hemts ◽  
Deep Uv
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