Single-resonator, time-switched FM MEMS accelerometer with theoretical offset drift complete cancellation

Author(s):  
Cristiano R. Marra ◽  
Filippo M. Ferrari ◽  
Saleh Karman ◽  
Alessandro Tocchio ◽  
Francesco Rizzini ◽  
...  
Keyword(s):  
2020 ◽  
Vol 23 (7) ◽  
pp. 25-33
Author(s):  
Luciane Agnoletti dos Santos Pedotti ◽  
Ricardo Mazza Zago ◽  
Mateus Giesbrecht ◽  
Fabiano Fruett

Sensors ◽  
2021 ◽  
Vol 21 (4) ◽  
pp. 1390
Author(s):  
Tomasz Ursel ◽  
Michał Olinski

This article aims to develop a system capable of estimating the displacement of a moving object with the usage of a relatively cheap and easy to apply sensors. There is a growing need for such systems, not only for robots, but also, for instance, pedestrian navigation. In this paper, the theory for this idea, including data postprocessing algorithms for a MEMS accelerometer and an optical flow sensor (OFS), as well as the developed complementary filter applied for sensor fusion, are presented. In addition, a vital part of the accelerometer’s algorithm, the zero velocity states detection, is implemented. It is based on analysis of the acceleration’s signal and further application of acceleration symmetrization, greatly improving the obtained displacement. A test stand with a linear guide and motor enabling imposing a specified linear motion is built. The results of both sensors’ testing suggest that the displacement estimated by each of them is highly correct. Fusion of the sensors’ data gives even better outcomes, especially in cases with external disturbance of OFS. The comparative evaluation of estimated linear displacements, in each case related to encoder data, confirms the algorithms’ operation correctness and proves the chosen sensors’ usefulness in the development of a linear displacement measuring system.


Author(s):  
Abhiraj Basavanna ◽  
Matthias Dienger ◽  
Jan Rockstroh ◽  
Steffen Keller ◽  
Alfons Dehe

2021 ◽  
pp. 1-1
Author(s):  
Pramod Martha ◽  
Naveen Kadayinti ◽  
V. Seena
Keyword(s):  

Micromachines ◽  
2021 ◽  
Vol 12 (3) ◽  
pp. 310
Author(s):  
Muhammad Mubasher Saleem ◽  
Shayaan Saghir ◽  
Syed Ali Raza Bukhari ◽  
Amir Hamza ◽  
Rana Iqtidar Shakoor ◽  
...  

This paper presents a new design of microelectromechanical systems (MEMS) based low-g accelerometer utilizing mode-localization effect in the three degree-of-freedom (3-DoF) weakly coupled MEMS resonators. Two sets of the 3-DoF mechanically coupled resonators are used on either side of the single proof mass and difference in the amplitude ratio of two resonator sets is considered as an output metric for the input acceleration measurement. The proof mass is electrostatically coupled to the perturbation resonators and for the sensitivity and input dynamic range tuning of MEMS accelerometer, electrostatic electrodes are used with each resonator in two sets of 3-DoF coupled resonators. The MEMS accelerometer is designed considering the foundry process constraints of silicon-on-insulator multi-user MEMS processes (SOIMUMPs). The performance of the MEMS accelerometer is analyzed through finite-element-method (FEM) based simulations. The sensitivity of the MEMS accelerometer in terms of amplitude ratio difference is obtained as 10.61/g for an input acceleration range of ±2 g with thermomechanical noise based resolution of 0.22 and nonlinearity less than 0.5%.


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