Sidewall Transfer Patterning-Based Nano-Crystalline MoS2 Sensing Element for Stress and Optical MEMS Sensor

2019 ◽  
Author(s):  
Vaibhav Rana ◽  
Anurag Singh ◽  
Akhil Ramesh ◽  
Veerendra Dhyani ◽  
Samaresh Das ◽  
...  
Keyword(s):  
Sensing Element ◽  
Optical Mems ◽  
Mems Sensor ◽  
Nano Crystalline

Design and Fabrication of an Optical-MEMS Sensor

2007 ◽  
Vol 1052 ◽  
Author(s):  
Vaibhav Mathur ◽  
Jin Li ◽  
William D. Goodhue
Keyword(s):  
Single Mode ◽  
External Source ◽  
Design Parameters ◽  
Material System ◽  
Test Results ◽  
Coupling Loss ◽  
Optical Mems ◽  
Mems Sensor ◽  
Fundamental Frequencies ◽  
Vibration Sensing

AbstractA novel optical-MEMS sensor based on the AlGaAs material system is designed and fabricated. The device consists of micro-beam waveguides butt-coupled with their ends separated by approximately 2 to 4 µm. The device works on the principle that when acoustically driven by an external source, the waveguides misalign, leading to coupling loss. The device design parameters were determined using FEM (Finite Element Method) modeling. The dielectric waveguide beams were designed for single mode propagation at 785 nm and longer wavelengths. A combination of dry and wet etching process followed by precision laser cutting was used to fabricate the suspended beams. Beams ranging from 100 µm to 400 µm with fundamental frequencies of 50 KHz to 200 KHz were successfully fabricated. Initial uncut waveguide test results will be discussed along with the plan for characterizing the devices using an acoustically coupled piezoelectric driver. These devices may be utilized for vibration sensing, or optical intensity modulation.

scholarly journals Intellectual Thermoconductometric Unit Based on Aerosol Printed Ceramic MEMS Sensor for the Measurement of Natural Gas Composition

Proceedings ◽  
2018 ◽  
Vol 2 (13) ◽  
pp. 736 ◽  
Author(s):  
Alexey Vasiliev ◽  
Ilia Shakhnovich ◽  
Nikolay Samotaev ◽  
Daniil Anisimov ◽  
Jan Dziuban ◽  
...  
Keyword(s):  
Detection Limit ◽  
Natural Gas ◽  
Calorific Value ◽  
Online Control ◽  
Gas Composition ◽  
Electronic Unit ◽  
Sensing Element ◽  
Plug And Play ◽  
Mems Sensor ◽  
Simple Possibility

The online control of natural gas quality is important for customers, because for them the important value is calorific value of consumed gas, but not its volume. The application of thermoconductometric sensor gives simple possibility to fabricate imbedded intellectual plug-and-play device for this control. The ceramic MEMS sensor based on a combination of this ceramic LTCC membrane and aerosol jet printed platinum microheater was used as a sensing element of this unit. The electronic unit controlling the sensor was designed to stabilize the temperature of the microheater and to measure power necessary to maintain this temperature at different concentrations of N2and CO2 in natural gas. The application of this unit enables the measurement of admixtures of nitrogen and CO2 with detection limit of about 1 vol. % sufficient for the application in gas meter instruments.

MEMS-above CMOS and novel optical MEMS sensor concepts

2020 ◽  
pp. 969-984
Author(s):  
H.A.C. Tilmans ◽  
V. Rochus ◽  
R. Jansen ◽  
W.J. Westervelde ◽  
M. Mahmud-ul-hasan ◽  
...  
Keyword(s):  
Optical Mems ◽  
Mems Sensor

An optical MEMS sensor utilizing a chitosan film for catechol detection

2009 ◽  
Vol 138 (1) ◽  
pp. 64-70 ◽  
Author(s):  
Peter Dykstra ◽  
Junjie Hao ◽  
Stephan T. Koev ◽  
Gregory F. Payne ◽  
Liangli Yu ◽  
...  
Keyword(s):  
Chitosan Film ◽  
Optical Mems ◽  
Mems Sensor

An ultra-sensitive optical MEMS sensor for partial discharge detection

2004 ◽  
Vol 15 (3) ◽  
pp. 521-527 ◽  
Author(s):  
Xiaodong Wang ◽  
Baoqing Li ◽  
Zhixiong Xiao ◽  
Sang Hwui Lee ◽  
Harry Roman ◽  
...  
Keyword(s):  
Partial Discharge ◽  
Optical Mems ◽  
Mems Sensor ◽  
Discharge Detection
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