Compact K-band distributed RF MEMS phase shifter based on high-speed switched capacitors

2011 ◽  
Author(s):  
Amrita Chakraborty ◽  
Avra Kundu ◽  
Sayantan Dhar ◽  
Santanu Maity ◽  
Sayan Chatterjee ◽  
...  
Keyword(s):  
High Speed ◽  
Phase Shifter ◽  
Rf Mems ◽  
Switched Capacitors ◽  
K Band

scholarly journals RF-MEMS Monolithic K and Ka Band Multi-State Phase Shifters as Building Blocks for 5G and Internet of Things (IoT) Applications

Sensors ◽  
2020 ◽  
Vol 20 (9) ◽  
pp. 2612 ◽  
Author(s):  
Jacopo Iannacci ◽  
Giuseppe Resta ◽  
Alvise Bagolini ◽  
Flavio Giacomozzi ◽  
Elena Bochkova ◽  
...  
Keyword(s):  
Internet Of Things ◽  
Communication Systems ◽  
High Speed ◽  
Phase Shifter ◽  
Satellite Communication ◽  
Rf Mems ◽  
Building Blocks ◽  
Phase Shifters ◽  
Small Cells ◽  
Mems Technology

RF-MEMS, i.e., Micro-Electro-Mechanical Systems (MEMS) for Radio Frequency (RF) passive components, exhibit interesting characteristics for the upcoming 5G and Internet of Things (IoT) scenarios, in which reconfigurable broadband and frequency-agile devices, like high-order switching units, tunable filters, multi-state attenuators, and phase shifters will be necessary to enable mm-Wave services, small cells, and advanced beamforming. In particular, satellite communication systems providing high-speed Internet connectivity utilize the K and Ka bands, which offer larger bandwidth compared to lower frequencies. This paper focuses on two design concepts of multi-state phase shifter designed and manufactured in RF-MEMS technology. The networks feature 4 switchable stages (16 states) and are developed for the K and Ka bands. The proposed phase shifters are realized in a surface micromachining RF-MEMS technology and the experimentally measured parameters are compared with Finite Element Method (FEM) multi-physical electromechanical and RF simulations. The simulated phase shifts at both the operating bands fit well the measured value, despite the measured losses (S21) are larger than 5–7 dB if compared to simulations. However, such a non-ideality has a technological motivation that is explained in the paper and that will be fixed in the manufacturing of future devices.

Phase Shifter Design Based on Fast RF MEMS Switched Capacitors

2008 ◽  
Author(s):  
Benjamin Lacroix ◽  
Arnaud Pothier ◽  
Aurelian Crunteanu ◽  
Pierre Blondy
Keyword(s):  
Phase Shifter ◽  
Rf Mems ◽  
Switched Capacitors

Development of different K-band MEMS phase shifter designs for satellite COTM terminals

2010 ◽  
Vol 2 (3-4) ◽  
pp. 263-271 ◽  
Author(s):  
P. Farinelli ◽  
S. Bastioli ◽  
E. Chiuppesi ◽  
F. Di Maggio ◽  
B. Margesin ◽  
...  
Keyword(s):  
Phase Shifter ◽  
Phased Array ◽  
Rf Mems ◽  
Low Cost ◽  
Phase Shifters ◽  
High Resistivity ◽  
Phased Array Antennas ◽  
Array Antennas ◽  
Rf Performance ◽  
K Band

This work presents the design, manufacturing, and testing of three 5-bit K-band Micro-Electro-Mechanical-Systems (MEMS) phase shifters based on similar architectures (combination of switched line and loaded line) but employing different MEMS switch typologies (cantilevers and air bridges) and RF junctions (SP2T and SP4T). All devices have been monolithically manufactured on 200 µm thick high resistivity silicon substrate (4″) by using the Fondazione Bruno Kessler (FBK) RF MEMS process. The performance of the different devices has been compared in order to identify the best configuration to be implemented in electronically steerable phased array antennas for satellite COTM (communication on the move) terminals. Excellent performances were measured for the dielectric-free pad RF MEMS switches as well as the single bits constituting the phase shifter. The three 5-bit devices show return losses better than 15 dB for all states, with average insertion loss of 3.5 dB for the clamped–clamped, SP2T-based design, 2.2 dB for the cantilever, SP2T-based device and 2.1 dB for the cantilever, SP4 T-based design. A low-cost Surface Mountable Technology (SMT) one-level package has been developed as well to allow the phase shifter integration into phased array antennas by using automatic surface mounting techniques. The design and simulation of the SMT package are also presented together with its measured RF performance.

Phase Shifter Design Based on Fast RF MEMS Switched Capacitors

2008 ◽  
Author(s):  
Benjamin Lacroix ◽  
Arnaud Pothier ◽  
Aurelian Crunteanu ◽  
Pierre Blondy
Keyword(s):  
Phase Shifter ◽  
Rf Mems ◽  
Switched Capacitors

scholarly journals Design and Analysis of Reconfigurable DMTL phase Shifter for High Speed Applications by Mechanical Tuning

2020 ◽  
Vol 9 (4) ◽  
pp. 333-339
Keyword(s):  
High Speed ◽  
Phase Shifter ◽  
Rf Mems ◽  
Planar Waveguides ◽  
Stress Factors ◽  
Mems Devices ◽  
Rf Switch ◽  
Switching Speed ◽  
Mems Switch ◽  
Mechanical Tuning

Tremendous advancement in the field of Radio-frequency were developed through Micro-fabrication techniques, these technologies miniaturize device in a micro-scale behavior for improved device performances. These technologies are developing rapidly due to its distinct features and wide usage in various applications ranging from switches to sensing devices. The principal behind this work is to build a MEMS based Reconfigurable DMTL phase shifter based on RF MEMS switch with improved device phenomenon like switching speed, low actuating voltage, losses and stress factors. The RF switch is build in a series behavior through co-planar waveguides. Generally switching speed is a major concern in RF MEMS devices because of the presence of the actuating elements within the structure which in turn hinders the device ability to function. The phase shifter designed helps in improving the overall switching speed of the device without electrical or dimension alternation of the device. In this paper, we are implementing a PUSH PULL based RF MEMS reconfigurable switch which was structurally altered based on triangular cantilevers in order to enhance the device switching speed. This would develop and enable better application in terms of reconfigurable phase shifter which can be operated at the wider bandgap applications. Even the resonant frequency enhancement was made which provokes an increase of 13% in terms of the switching speed.

scholarly journals Recent Developments of Reflectarray Antennas for Reconfigurable Beams Using Surface-Mounted RF-MEMS

2012 ◽  
Vol 2012 ◽  
pp. 1-12 ◽  
Author(s):  
Eduardo Carrasco ◽  
Mariano Barba ◽  
Manuel Arrebola ◽  
Jose A. Encinar
Keyword(s):  
Phase Shifter ◽  
Rf Mems ◽  
Low Cost ◽  
Phase Control ◽  
Electronic Control ◽  
Delay Lines ◽  
Mems Switches ◽  
Manufacturing Complexity ◽  
Recent Developments ◽  
Control Devices

Some of the most recent developments in reconfigurable reflectarrays using surface-mounted RF-MEMS, which have been developed at the Universidad Politécnica de Madrid, are summarized in this paper. The results include reconfigurable elements based on patches aperture-coupled to delay lines in two configurations: single elements and gathered elements which form subarrays with common phase control. The former include traditional aperture-coupled elements and a novel wideband reflectarray element which has been designed using two stacked patches. The latter are proposed as a low cost solution for reducing the number of electronic control devices as well as the manufacturing complexity of large reflectarrays. The main advantages and drawbacks of the grouping are evaluated in both pencil and shaped-beam antennas. In all the cases, the effects of the MEMS switches and their assembly circuitry are evaluated when they are used in a 2-bit phase shifter which can be extended to more bits, demonstrating that the proposed elements can be used efficiently in reconfigurable-beam reflectarrays.

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